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A2-ILT: GPU Accelerated ILT with Spatial Attention Mechanism
Qijing Wang
, Bentian Jiang
,
Martin D.F. Wong
, Evangeline F.Y. Young
Research output
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Chapter in Book/Report/Conference proceeding
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Keyphrases
GPU Acceleration
100%
Inverse Lithography Technology
100%
Spatial Attention Mechanism
100%
Resolution Enhancement
12%
Runtime Performance
12%
Computation Overhead
12%
Reinforcement Learning
12%
Design for Manufacturing
12%
Writing Time
12%
Modern Design
12%
Technology Framework
12%
Error Variation
12%
Technology Quality
12%
Process Variation Band
12%
Spatial Attention Map
12%
Technology Flows
12%
Rectilinearization
12%
Mask Writing
12%
Computer Science
Attention (Machine Learning)
100%
Graphics Processing Unit
100%
Experimental Result
33%
Process Variation
33%
Reinforcement Learning
33%