A1 Resonators in 128° Y-cut Lithium Niobate with Electromechanical Coupling of 46.4%

Ruochen Lu, Yansong Yang, Steffen Link, Songbin Gong

Research output: Contribution to journalArticle

Abstract

In this work, we present first-order antisymmetric (A1) mode resonators in 128° Y-cut lithium niobate (LiNbO₃) thin films with electromechanical coupling coefficients (k²) as large as 46.4%, exceeding the state-of-the-art. The achievable k² of A1 in LiNbO₃ substrates of different orientations is first explored, showing X-axis direction in 128° Y-cut LiNbO₃ among the optimal combinations. Subsequently, A1 resonators with spurious mode mitigation are designed and fabricated. In addition to the large k², the implemented devices show a maximum quality factor (Q) of 598 at 3.2 GHz. Upon further optimization, the reported platform can potentially deliver a wideband acoustic-only filtering solution in 5G New Radio. [2020-0003]

Original languageEnglish (US)
JournalJournal of Microelectromechanical Systems
DOIs
StateAccepted/In press - Jan 1 2020

Keywords

  • 5G mobile communication
  • 5G new radio
  • acoustic resonators
  • Acoustics
  • Couplings
  • Lamb wave
  • Lithium niobate
  • lithium niobate
  • microelectromechanical devices
  • piezoelectric devices.
  • Resonators
  • Substrates
  • Wideband

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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