A virtual-interferometer technique for surface metrology

Scott M. Jobling, Paul G. Kwiat

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have demonstrated a novel technique for performing surface metrology within wavefrontfeedback systems. By using wavefront sensing to measure surface gradients via displacements of an optic, we have reconstructed several surfaces with 40-nm RMS error.

Original languageEnglish (US)
Title of host publicationFrontiers in Optics, FiO 2009
PublisherOptical Society of America (OSA)
ISBN (Print)9781557528780
DOIs
StatePublished - 2009
EventFrontiers in Optics, FiO 2009 - San Jose, CA, United States
Duration: Oct 11 2009Oct 15 2009

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherFrontiers in Optics, FiO 2009
CountryUnited States
CitySan Jose, CA
Period10/11/0910/15/09

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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