Abstract
Traditional technologies for far-infrared (FIR) spectroscopy generally involve bulky dispersive optics. Integrated filter bank spectrometers promise more compact designs, but implementations using superconducting transmission line networks become lossy at terahertz frequencies. We describe a novel on-chip spectrometer architecture designed to extend this range. A filter bank spectrometer is implemented using vacuum waveguide etched into a silicon wafer stack. A single trunk line feeds an array of resonant cavities, each coupled to a kinetic inductance detector fabricated on an adjacent wafer. We discuss the design and fabrication of a prototype implementation, initial test results at ambient temperature, and prospects for future development.
Original language | English (US) |
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Pages (from-to) | 408-416 |
Number of pages | 9 |
Journal | Journal of Low Temperature Physics |
Volume | 216 |
Issue number | 1-2 |
DOIs | |
State | Published - Jul 2024 |
Keywords
- Far-infrared
- MKID
- Spectroscopy
- Terahertz
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- General Materials Science
- Condensed Matter Physics