Abstract
In this work, we present a novel unidirectional transducer design for frequency scaling aluminum nitride (AlN)-based radio frequency (RF) microsystems. The proposed thickness-field-excited single-phase unidirectional transducers (TFE-SPUDT) adopt 5/16 wavelength electrodes and, thus, enable efficient piezoelectric transduction with better frequency scalability. The design space of the TFE-SPUDT is theoretically explored and validated using the acoustic delay line (ADL) testbeds. The ADL testbeds with a large feature size of~\mu \text{m}$ show a center frequency of 1 GHz, a minimum insertion loss (IL) of 4.9 dB, and a fractional bandwidth (FBW) of 5.3%, significantly surpassing the IL and frequency scalability of the previously reported AlN transducers. The design approach can potentially contribute to various AlN-based RF microsystems for signal processing, physical sensing, optomechanical interaction, and quantum acoustic applications, and are readily extendable to other piezoelectric platforms.
Original language | English (US) |
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Article number | 8963898 |
Pages (from-to) | 1250-1257 |
Number of pages | 8 |
Journal | IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control |
Volume | 67 |
Issue number | 6 |
DOIs | |
State | Published - Jun 2020 |
Keywords
- Acoustic delay lines (ADLs)
- aluminum nitride (AlN)
- lamb mode
- piezoelectric transducers
- radio frequency (RF) microsystems
- unidirectional transducers
ASJC Scopus subject areas
- Instrumentation
- Acoustics and Ultrasonics
- Electrical and Electronic Engineering