@inproceedings{69d4a362c8c84716bbbc7223d36767c5,
title = "A two degree-of-freedom soi-mems translation stage with closed loop positioning",
author = "Bonjin Koo and Jingyan Dong and Ferreira, {Placid M.}",
year = "2011",
month = dec,
day = "1",
language = "English (US)",
isbn = "9781887706582",
series = "Proceedings - ASPE 2011 Annual Meeting",
pages = "87--89",
booktitle = "Proceedings - ASPE 2011 Annual Meeting",
note = "26th Annual Meeting of the American Society for Precision Engineering, ASPE 2011 ; Conference date: 13-11-2011 Through 18-11-2011",
}