A transconductive graphene pressure sensor

A. M. Hurst, S. Lee, N. Petrone, J. Vandeweert, A. M. Van Der Zande, J. Hone

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present a graphene pressure transducer consisting of an array of suspended circular graphene membranes over 3μm diameter holes in silicon dioxide on degenerately doped silicon. The transconductive nature of graphene allows the change in pressure to be translated into a change in resistance across the suspended graphene membranes. The pressure-induced deflections of the membrane vary the distance between the DC biased silicon back-gate and graphene membrane, changing the effective electric field which results in variations in the resistance of the suspended graphene. Our results demonstrate that pressure sensors constructed with graphene possess potential advantages over conventional pressure sensors such as higher sensitivity with diaphragm dimensions over 200X smaller than that of typical pressure transducers.

Original languageEnglish (US)
Title of host publication2013 Transducers and Eurosensors XXVII
Subtitle of host publicationThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages586-589
Number of pages4
DOIs
StatePublished - Dec 1 2013
Externally publishedYes
Event2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain
Duration: Jun 16 2013Jun 20 2013

Publication series

Name2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Other

Other2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
CountrySpain
CityBarcelona
Period6/16/136/20/13

Fingerprint

Pressure sensors
Graphene
Membranes
Pressure transducers
Silicon
Diaphragms
Silica
Electric fields

Keywords

  • Graphene
  • chemical vapor deposition graphene device
  • pressure transducer
  • sensor
  • static and dynamic pressure
  • transconductance

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Hurst, A. M., Lee, S., Petrone, N., Vandeweert, J., Van Der Zande, A. M., & Hone, J. (2013). A transconductive graphene pressure sensor. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 586-589). [6626834] (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). https://doi.org/10.1109/Transducers.2013.6626834

A transconductive graphene pressure sensor. / Hurst, A. M.; Lee, S.; Petrone, N.; Vandeweert, J.; Van Der Zande, A. M.; Hone, J.

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 586-589 6626834 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hurst, AM, Lee, S, Petrone, N, Vandeweert, J, Van Der Zande, AM & Hone, J 2013, A transconductive graphene pressure sensor. in 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013., 6626834, 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, pp. 586-589, 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, Barcelona, Spain, 6/16/13. https://doi.org/10.1109/Transducers.2013.6626834
Hurst AM, Lee S, Petrone N, Vandeweert J, Van Der Zande AM, Hone J. A transconductive graphene pressure sensor. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 586-589. 6626834. (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). https://doi.org/10.1109/Transducers.2013.6626834
Hurst, A. M. ; Lee, S. ; Petrone, N. ; Vandeweert, J. ; Van Der Zande, A. M. ; Hone, J. / A transconductive graphene pressure sensor. 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. pp. 586-589 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013).
@inproceedings{b14e6327d6eb4cc6894eb963b5a01fbc,
title = "A transconductive graphene pressure sensor",
abstract = "We present a graphene pressure transducer consisting of an array of suspended circular graphene membranes over 3μm diameter holes in silicon dioxide on degenerately doped silicon. The transconductive nature of graphene allows the change in pressure to be translated into a change in resistance across the suspended graphene membranes. The pressure-induced deflections of the membrane vary the distance between the DC biased silicon back-gate and graphene membrane, changing the effective electric field which results in variations in the resistance of the suspended graphene. Our results demonstrate that pressure sensors constructed with graphene possess potential advantages over conventional pressure sensors such as higher sensitivity with diaphragm dimensions over 200X smaller than that of typical pressure transducers.",
keywords = "Graphene, chemical vapor deposition graphene device, pressure transducer, sensor, static and dynamic pressure, transconductance",
author = "Hurst, {A. M.} and S. Lee and N. Petrone and J. Vandeweert and {Van Der Zande}, {A. M.} and J. Hone",
year = "2013",
month = "12",
day = "1",
doi = "10.1109/Transducers.2013.6626834",
language = "English (US)",
isbn = "9781467359818",
series = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",
pages = "586--589",
booktitle = "2013 Transducers and Eurosensors XXVII",

}

TY - GEN

T1 - A transconductive graphene pressure sensor

AU - Hurst, A. M.

AU - Lee, S.

AU - Petrone, N.

AU - Vandeweert, J.

AU - Van Der Zande, A. M.

AU - Hone, J.

PY - 2013/12/1

Y1 - 2013/12/1

N2 - We present a graphene pressure transducer consisting of an array of suspended circular graphene membranes over 3μm diameter holes in silicon dioxide on degenerately doped silicon. The transconductive nature of graphene allows the change in pressure to be translated into a change in resistance across the suspended graphene membranes. The pressure-induced deflections of the membrane vary the distance between the DC biased silicon back-gate and graphene membrane, changing the effective electric field which results in variations in the resistance of the suspended graphene. Our results demonstrate that pressure sensors constructed with graphene possess potential advantages over conventional pressure sensors such as higher sensitivity with diaphragm dimensions over 200X smaller than that of typical pressure transducers.

AB - We present a graphene pressure transducer consisting of an array of suspended circular graphene membranes over 3μm diameter holes in silicon dioxide on degenerately doped silicon. The transconductive nature of graphene allows the change in pressure to be translated into a change in resistance across the suspended graphene membranes. The pressure-induced deflections of the membrane vary the distance between the DC biased silicon back-gate and graphene membrane, changing the effective electric field which results in variations in the resistance of the suspended graphene. Our results demonstrate that pressure sensors constructed with graphene possess potential advantages over conventional pressure sensors such as higher sensitivity with diaphragm dimensions over 200X smaller than that of typical pressure transducers.

KW - Graphene

KW - chemical vapor deposition graphene device

KW - pressure transducer

KW - sensor

KW - static and dynamic pressure

KW - transconductance

UR - http://www.scopus.com/inward/record.url?scp=84891710766&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84891710766&partnerID=8YFLogxK

U2 - 10.1109/Transducers.2013.6626834

DO - 10.1109/Transducers.2013.6626834

M3 - Conference contribution

AN - SCOPUS:84891710766

SN - 9781467359818

T3 - 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

SP - 586

EP - 589

BT - 2013 Transducers and Eurosensors XXVII

ER -