A temperature sensor from a self-assembled carbon nanotube microbridge

M. De Volder, D. Reynaerts, C. Van Hoof, S. Tawfick, A. J. Hart

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Recent studies show that carbon nanotubes (CNTs) can be used as temperature sensors, and offer great opportunities towards extreme miniaturization, high sensitivity, low power consumption, and rapid response. Previous CNT based temperature sensors are fabricated by either dielectrophoresis or piece-wise alignment of read-out electronics around randomly dispersed CNTs. We introduce a new deterministic and parallel microsensor fabrication method based on the self-assembly of CNTs into three-dimensional microbridges. We fabricated prototype microbridge sensors on patterned electrodes, and found their sensitivity to be better than -0.1 %/K at temperatures between 300K and 420K. This performance is comparable to previously published CNT based temperature sensors. Importantly, however, our research shows how unique sensor architectures can be made by self-assembly, which can be achieved using batch processing rather than piecewise assembly.

Original languageEnglish (US)
Title of host publicationIEEE Sensors 2010 Conference, SENSORS 2010
Pages2369-2372
Number of pages4
DOIs
StatePublished - Dec 1 2010
Externally publishedYes
Event9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States
Duration: Nov 1 2010Nov 4 2010

Publication series

NameProceedings of IEEE Sensors

Other

Other9th IEEE Sensors Conference 2010, SENSORS 2010
Country/TerritoryUnited States
CityWaikoloa, HI
Period11/1/1011/4/10

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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