@inproceedings{be49b134070f483b9e6a83e55164c77f,
title = "A temperature insensitive DC-contact RF-MEMS switch",
abstract = "This article details an investigation on the temperature variation of cantilever-structured RF-MEMS switches. Temperature-induced out-of-plane deformation of the cantilever was observed in the measurement of cryogenic switches in this research. Three-dimensional multi-physics finite element analysis was performed to explain the deformation. Experimental results are also shown to verify the simulation results. A stress-relaxation geometry is proposed and fabricated for a temperature insensitive switch design. The measured temperature insensitive switch demonstrates an actuation voltage response to temperature of 11 mV/K over 220 K temperature range (300 to 77 K) and outstanding broadband RF performance with an insertion-loss less than 0.8 dB and isolation better than 24 dB up to 50 GHz.",
keywords = "Broadband, Cantilever, Cryogenic, DC-contact, Low loss, MEMS, Series switch",
author = "Songbin Gong and Theodore Reck and Barker, {N. Scott}",
year = "2010",
language = "English (US)",
isbn = "9782874870163",
series = "European Microwave Week 2010, EuMW2010: Connecting the World, Conference Proceedings - European Microwave Conference, EuMC 2010",
pages = "1114--1117",
booktitle = "European Microwave Week 2010, EuMW2010",
note = "13th European Microwave Week 2010, EuMW2010: Connecting the World - 40th European Microwave Conference, EuMC 2010 ; Conference date: 28-09-2010 Through 30-09-2010",
}