Abstract
A 0.18μm SOI-CMOS bioelectrical sensing technology is introduced. An SOC chip integrates biosensor pixel arrays, controllers and amplifiers is used to demonstrate the performance of this technology. The pixel size in the pixel arrays is 10μm × 10μm, including biosensor, temperature sensor and heaters. The chip demonstrates detections of hydrogen ion concentration, enzymatic reactions and DNA hybridization with PCR. Experimental results show close to Nernst limit of 59mV/pH in ion concentration detection, sub-millimolar resolutions with 99.9% linearity in urea, and 400mV surface potential change in DNA hybridization. The SOC chip has an addressable temperature control for each pixel with embedded thermal sensors. A thermal time constant of 35msec/K and sub-degree localized temperature control are achieved. Order of magnitude improvements over previously reported are seen in both detectable minimum sample liquid volume and thermal time constant for PCR. This is a good demonstration of semiconductor technology for multi-biomarkers detection for medical applications.
| Original language | English (US) |
|---|---|
| Article number | 7047058 |
| Pages (from-to) | 15.4.1-15.4.4 |
| Journal | Technical Digest - International Electron Devices Meeting, IEDM |
| Volume | 2015-February |
| Issue number | February |
| DOIs | |
| State | Published - Feb 20 2015 |
| Event | 2014 60th IEEE International Electron Devices Meeting, IEDM 2014 - San Francisco, United States Duration: Dec 15 2014 → Dec 17 2014 |
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ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry
Cite this
A semiconductor bio-electrical platform with addressable thermal control circuits for accelerated bioassay development. / Chen, T. T.; Wen, C. H.; Huang, J. C.; Peng, Y. C.; Liu, S.; Su, S. H.; Cheng, L. H.; Lai, H. C.; Liao, T. C.; Lai, F. L.; Cheng, C. W.; Yang, C. K.; Yang, J. H.; Hsieh, Y. J.; Salm, E.; Reddy, B.; Tsui, F.; Liu, Y. S.; Bashir, R.; Chen, M.
In: Technical Digest - International Electron Devices Meeting, IEDM, Vol. 2015-February, No. February, 7047058, 20.02.2015, p. 15.4.1-15.4.4.Research output: Contribution to journal › Conference article
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TY - JOUR
T1 - A semiconductor bio-electrical platform with addressable thermal control circuits for accelerated bioassay development
AU - Chen, T. T.
AU - Wen, C. H.
AU - Huang, J. C.
AU - Peng, Y. C.
AU - Liu, S.
AU - Su, S. H.
AU - Cheng, L. H.
AU - Lai, H. C.
AU - Liao, T. C.
AU - Lai, F. L.
AU - Cheng, C. W.
AU - Yang, C. K.
AU - Yang, J. H.
AU - Hsieh, Y. J.
AU - Salm, E.
AU - Reddy, B.
AU - Tsui, F.
AU - Liu, Y. S.
AU - Bashir, R.
AU - Chen, M.
PY - 2015/2/20
Y1 - 2015/2/20
N2 - A 0.18μm SOI-CMOS bioelectrical sensing technology is introduced. An SOC chip integrates biosensor pixel arrays, controllers and amplifiers is used to demonstrate the performance of this technology. The pixel size in the pixel arrays is 10μm × 10μm, including biosensor, temperature sensor and heaters. The chip demonstrates detections of hydrogen ion concentration, enzymatic reactions and DNA hybridization with PCR. Experimental results show close to Nernst limit of 59mV/pH in ion concentration detection, sub-millimolar resolutions with 99.9% linearity in urea, and 400mV surface potential change in DNA hybridization. The SOC chip has an addressable temperature control for each pixel with embedded thermal sensors. A thermal time constant of 35msec/K and sub-degree localized temperature control are achieved. Order of magnitude improvements over previously reported are seen in both detectable minimum sample liquid volume and thermal time constant for PCR. This is a good demonstration of semiconductor technology for multi-biomarkers detection for medical applications.
AB - A 0.18μm SOI-CMOS bioelectrical sensing technology is introduced. An SOC chip integrates biosensor pixel arrays, controllers and amplifiers is used to demonstrate the performance of this technology. The pixel size in the pixel arrays is 10μm × 10μm, including biosensor, temperature sensor and heaters. The chip demonstrates detections of hydrogen ion concentration, enzymatic reactions and DNA hybridization with PCR. Experimental results show close to Nernst limit of 59mV/pH in ion concentration detection, sub-millimolar resolutions with 99.9% linearity in urea, and 400mV surface potential change in DNA hybridization. The SOC chip has an addressable temperature control for each pixel with embedded thermal sensors. A thermal time constant of 35msec/K and sub-degree localized temperature control are achieved. Order of magnitude improvements over previously reported are seen in both detectable minimum sample liquid volume and thermal time constant for PCR. This is a good demonstration of semiconductor technology for multi-biomarkers detection for medical applications.
UR - http://www.scopus.com/inward/record.url?scp=84938221315&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84938221315&partnerID=8YFLogxK
U2 - 10.1109/IEDM.2014.7047058
DO - 10.1109/IEDM.2014.7047058
M3 - Conference article
AN - SCOPUS:84938221315
VL - 2015-February
SP - 15.4.1-15.4.4
JO - Technical Digest - International Electron Devices Meeting
JF - Technical Digest - International Electron Devices Meeting
SN - 0163-1918
IS - February
M1 - 7047058
ER -