TY - GEN

T1 - A polynomial time exact algorithm for self-aligned double patterning layout decomposition

AU - Xiao, Zigang

AU - Du, Yuelin

AU - Zhang, Hongbo

AU - Wong, Martin D.F.

PY - 2012

Y1 - 2012

N2 - Double patterning lithography (DPL) technologies have become a must for today's sub-32nm technology nodes. There are two leading DPL technologies: self-aligned double patterning (SADP) and litho-etch-litho-etch (LELE). Among these two DPL technologies, SADP has the significant advantage over LELE in its ability to avoid overlay, making it the likely DPL candidate for the next technology node of 14nm. In any DPL technology, layout decomposition is the key problem. While the layout decomposition problem for LELE has been well-studied in the literature, only few attempts have been made to address the SADP layout decomposition problem. In this paper, we present the first polynomial time exact (optimal) algorithm to determine if a given layout has an overlay-free SADP decomposition. All previous exact algorithms were computationally expensive exponential time algorithms based on SAT or ILP. Other previous algorithms for the problem were heuristics without having any guarantee that an overlay-free solution can be found even if one exists.

AB - Double patterning lithography (DPL) technologies have become a must for today's sub-32nm technology nodes. There are two leading DPL technologies: self-aligned double patterning (SADP) and litho-etch-litho-etch (LELE). Among these two DPL technologies, SADP has the significant advantage over LELE in its ability to avoid overlay, making it the likely DPL candidate for the next technology node of 14nm. In any DPL technology, layout decomposition is the key problem. While the layout decomposition problem for LELE has been well-studied in the literature, only few attempts have been made to address the SADP layout decomposition problem. In this paper, we present the first polynomial time exact (optimal) algorithm to determine if a given layout has an overlay-free SADP decomposition. All previous exact algorithms were computationally expensive exponential time algorithms based on SAT or ILP. Other previous algorithms for the problem were heuristics without having any guarantee that an overlay-free solution can be found even if one exists.

KW - Layout decomposition

KW - Polynomial time algorithm

KW - Self-aligned double patterning

UR - http://www.scopus.com/inward/record.url?scp=84860235851&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84860235851&partnerID=8YFLogxK

U2 - 10.1145/2160916.2160922

DO - 10.1145/2160916.2160922

M3 - Conference contribution

AN - SCOPUS:84860235851

SN - 9781450311670

T3 - Proceedings of the International Symposium on Physical Design

SP - 17

EP - 24

BT - ISPD'12 - Proceedings of the 2012 International Symposium on Physical Design

T2 - 2012 ACM International Symposium on Physical Design, ISPD'12

Y2 - 25 March 2012 through 28 May 2012

ER -