Abstract

The present approach to modeling and design of microelectronic and microelectromechanical devices (MEMS) (hereafter simply referred to as a microdevice) involves the generation of a geometric model for the complicated two or three-dimensional microdevice, the generation of a mesh for the geometric model, a mesh based numerical analysis, and postprocessing steps such as visualization. The time consuming steps in such an approach are the generation of a mesh and mesh-based numerical analysis. Meshless methods, which do not require the generation of a mesh, are very attractive for numerical solution of partial differential equations. In this paper we introduce a new meshless technique, referred to as a point collocation method, for numerical solution of partial differential equations. The effectiveness of the point collocation method is demonstrated by solving the one and two-dimensional Poisson equation, the solution of which is required in the analysis of both electronic and microelectromechanical devices.

Original languageEnglish (US)
Title of host publicationExtended Abstracts of 1998 6th International Workshop on Computational Electronics, IWCE 1998
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages54-57
Number of pages4
ISBN (Electronic)0780343697, 9780780343696
DOIs
StatePublished - Jan 1 1998
Event6th International Workshop on Computational Electronics, IWCE 1998 - Osaka, Japan
Duration: Oct 19 1998Oct 21 1998

Publication series

NameExtended Abstracts of 1998 6th International Workshop on Computational Electronics, IWCE 1998
Volume1998-October

Other

Other6th International Workshop on Computational Electronics, IWCE 1998
CountryJapan
CityOsaka
Period10/19/9810/21/98

ASJC Scopus subject areas

  • Modeling and Simulation
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Mathematical Physics

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