A Piezoelectric Micromachined Ultrasonic Transducer Using Thin-Film Lithium Niobate

Ruochen Lu; Michael Breen; Ahmed E. Hassanien; Yansong Yang; Songbin Gong

doi:10.1109/JMEMS.2020.3026547

A Piezoelectric Micromachined Ultrasonic Transducer Using Thin-Film Lithium Niobate

Ruochen Lu, Michael Breen, Ahmed E. Hassanien, Yansong Yang, Songbin Gong

Research output: Contribution to journal › Article › peer-review

Abstract

This letter presents the first piezoelectric micromachined ultrasonic transducer (PMUT) based on thin-film lithium niobate (LiNbO3). The figures of merit (FoMs) of LiNbO3 as ultrasound sensors and transducers are first studied, showing great prospective as a balanced transceiver platform. Efficient flexural mode excitation is achieved using a proposed lateral-field-excitation (LFE) structure. The implemented device shows a flexural mode at 7.6 MHz, with a high electromechanical coupling ( k2) of 4.2%. Measured quality factor (Q) in vacuum is 2605, indicating the low structural loss, while measured Q in air is 264, suggesting the ultrasound radiation. A dynamic displacement sensitivity of 20.2 nm/V is measured. Upon further optimizations, LiNbO3-based PMUTs are promising candidates for miniature ultrasound applications. [2020-0287]

Original language	English (US)
Article number	9211721
Pages (from-to)	1412-1414
Number of pages	3
Journal	Journal of Microelectromechanical Systems
Volume	29
Issue number	6
DOIs	https://doi.org/10.1109/JMEMS.2020.3026547
State	Published - Dec 2020

Keywords

Piezoelectric micromachined ultrasound transducers (PMUT)
lithium niobate
piezoelectric transducer

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

Online availability

10.1109/JMEMS.2020.3026547

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title = "A Piezoelectric Micromachined Ultrasonic Transducer Using Thin-Film Lithium Niobate",

abstract = "This letter presents the first piezoelectric micromachined ultrasonic transducer (PMUT) based on thin-film lithium niobate (LiNbO3). The figures of merit (FoMs) of LiNbO3 as ultrasound sensors and transducers are first studied, showing great prospective as a balanced transceiver platform. Efficient flexural mode excitation is achieved using a proposed lateral-field-excitation (LFE) structure. The implemented device shows a flexural mode at 7.6 MHz, with a high electromechanical coupling ( k2) of 4.2%. Measured quality factor (Q) in vacuum is 2605, indicating the low structural loss, while measured Q in air is 264, suggesting the ultrasound radiation. A dynamic displacement sensitivity of 20.2 nm/V is measured. Upon further optimizations, LiNbO3-based PMUTs are promising candidates for miniature ultrasound applications. [2020-0287] ",

keywords = "Piezoelectric micromachined ultrasound transducers (PMUT), lithium niobate, piezoelectric transducer",

author = "Ruochen Lu and Michael Breen and Hassanien, {Ahmed E.} and Yansong Yang and Songbin Gong",

note = "Funding Information: Manuscript received July 31, 2020; revised September 14, 2020; accepted September 22, 2020. Date of publication October 2, 2020; date of current version December 1, 2020. This work was supported by the Defense Advanced Research Projects Agency-Microsystems Technology Office under the A MEchanically Based Antenna (AMEBA) Program. Subject Editor E. S. Kim. (Corresponding author: Ruochen Lu.) The authors are with the Department of Electrical and Computing Engineering, University of Illinois at Urbana–Champaign, Champaign, IL 61801 USA (e-mail: rlu10@illinois.edu). Publisher Copyright: {\textcopyright} 1992-2012 IEEE.",

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N1 - Funding Information: Manuscript received July 31, 2020; revised September 14, 2020; accepted September 22, 2020. Date of publication October 2, 2020; date of current version December 1, 2020. This work was supported by the Defense Advanced Research Projects Agency-Microsystems Technology Office under the A MEchanically Based Antenna (AMEBA) Program. Subject Editor E. S. Kim. (Corresponding author: Ruochen Lu.) The authors are with the Department of Electrical and Computing Engineering, University of Illinois at Urbana–Champaign, Champaign, IL 61801 USA (e-mail: rlu10@illinois.edu). Publisher Copyright: © 1992-2012 IEEE.

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N2 - This letter presents the first piezoelectric micromachined ultrasonic transducer (PMUT) based on thin-film lithium niobate (LiNbO3). The figures of merit (FoMs) of LiNbO3 as ultrasound sensors and transducers are first studied, showing great prospective as a balanced transceiver platform. Efficient flexural mode excitation is achieved using a proposed lateral-field-excitation (LFE) structure. The implemented device shows a flexural mode at 7.6 MHz, with a high electromechanical coupling ( k2) of 4.2%. Measured quality factor (Q) in vacuum is 2605, indicating the low structural loss, while measured Q in air is 264, suggesting the ultrasound radiation. A dynamic displacement sensitivity of 20.2 nm/V is measured. Upon further optimizations, LiNbO3-based PMUTs are promising candidates for miniature ultrasound applications. [2020-0287]

AB - This letter presents the first piezoelectric micromachined ultrasonic transducer (PMUT) based on thin-film lithium niobate (LiNbO3). The figures of merit (FoMs) of LiNbO3 as ultrasound sensors and transducers are first studied, showing great prospective as a balanced transceiver platform. Efficient flexural mode excitation is achieved using a proposed lateral-field-excitation (LFE) structure. The implemented device shows a flexural mode at 7.6 MHz, with a high electromechanical coupling ( k2) of 4.2%. Measured quality factor (Q) in vacuum is 2605, indicating the low structural loss, while measured Q in air is 264, suggesting the ultrasound radiation. A dynamic displacement sensitivity of 20.2 nm/V is measured. Upon further optimizations, LiNbO3-based PMUTs are promising candidates for miniature ultrasound applications. [2020-0287]

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A Piezoelectric Micromachined Ultrasonic Transducer Using Thin-Film Lithium Niobate

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