Abstract
This letter presents the first piezoelectric micromachined ultrasonic transducer (PMUT) based on thin-film lithium niobate (LiNbO3). The figures of merit (FoMs) of LiNbO3 as ultrasound sensors and transducers are first studied, showing great prospective as a balanced transceiver platform. Efficient flexural mode excitation is achieved using a proposed lateral-field-excitation (LFE) structure. The implemented device shows a flexural mode at 7.6 MHz, with a high electromechanical coupling ( k2) of 4.2%. Measured quality factor (Q) in vacuum is 2605, indicating the low structural loss, while measured Q in air is 264, suggesting the ultrasound radiation. A dynamic displacement sensitivity of 20.2 nm/V is measured. Upon further optimizations, LiNbO3-based PMUTs are promising candidates for miniature ultrasound applications. [2020-0287]
Original language | English (US) |
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Article number | 9211721 |
Pages (from-to) | 1412-1414 |
Number of pages | 3 |
Journal | Journal of Microelectromechanical Systems |
Volume | 29 |
Issue number | 6 |
DOIs | |
State | Published - Dec 2020 |
Keywords
- Piezoelectric micromachined ultrasound transducers (PMUT)
- lithium niobate
- piezoelectric transducer
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering