TY - JOUR
T1 - A Piezoelectric Micromachined Ultrasonic Transducer Using Thin-Film Lithium Niobate
AU - Lu, Ruochen
AU - Breen, Michael
AU - Hassanien, Ahmed E.
AU - Yang, Yansong
AU - Gong, Songbin
N1 - Manuscript received July 31, 2020; revised September 14, 2020; accepted September 22, 2020. Date of publication October 2, 2020; date of current version December 1, 2020. This work was supported by the Defense Advanced Research Projects Agency-Microsystems Technology Office under the A MEchanically Based Antenna (AMEBA) Program. Subject Editor E. S. Kim. (Corresponding author: Ruochen Lu.) The authors are with the Department of Electrical and Computing Engineering, University of Illinois at Urbana–Champaign, Champaign, IL 61801 USA (e-mail: [email protected]).
PY - 2020/12
Y1 - 2020/12
N2 - This letter presents the first piezoelectric micromachined ultrasonic transducer (PMUT) based on thin-film lithium niobate (LiNbO3). The figures of merit (FoMs) of LiNbO3 as ultrasound sensors and transducers are first studied, showing great prospective as a balanced transceiver platform. Efficient flexural mode excitation is achieved using a proposed lateral-field-excitation (LFE) structure. The implemented device shows a flexural mode at 7.6 MHz, with a high electromechanical coupling ( k2) of 4.2%. Measured quality factor (Q) in vacuum is 2605, indicating the low structural loss, while measured Q in air is 264, suggesting the ultrasound radiation. A dynamic displacement sensitivity of 20.2 nm/V is measured. Upon further optimizations, LiNbO3-based PMUTs are promising candidates for miniature ultrasound applications.
AB - This letter presents the first piezoelectric micromachined ultrasonic transducer (PMUT) based on thin-film lithium niobate (LiNbO3). The figures of merit (FoMs) of LiNbO3 as ultrasound sensors and transducers are first studied, showing great prospective as a balanced transceiver platform. Efficient flexural mode excitation is achieved using a proposed lateral-field-excitation (LFE) structure. The implemented device shows a flexural mode at 7.6 MHz, with a high electromechanical coupling ( k2) of 4.2%. Measured quality factor (Q) in vacuum is 2605, indicating the low structural loss, while measured Q in air is 264, suggesting the ultrasound radiation. A dynamic displacement sensitivity of 20.2 nm/V is measured. Upon further optimizations, LiNbO3-based PMUTs are promising candidates for miniature ultrasound applications.
KW - Piezoelectric micromachined ultrasound transducers (PMUT)
KW - lithium niobate
KW - piezoelectric transducer
UR - http://www.scopus.com/inward/record.url?scp=85097328145&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85097328145&partnerID=8YFLogxK
U2 - 10.1109/JMEMS.2020.3026547
DO - 10.1109/JMEMS.2020.3026547
M3 - Article
AN - SCOPUS:85097328145
SN - 1057-7157
VL - 29
SP - 1412
EP - 1414
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
IS - 6
M1 - 9211721
ER -