A novel tool for mapping composition distributions in semiconductor microstructures - Application to InxGa1-xP quantum wires

P. Dua, S. L. Cooper, K. Y. Cheng

Research output: Contribution to journalReview articlepeer-review

Abstract

A technique is described which employs resonant Raman scattering for nondestructive, quantitative analysis of alloy composition distributions and their volume fractions in semiconductor microstructures. Use of this technique is demonstrated via application to extract the wire and barrier region compositions and the shape of the composition modulation profile of narrow (∼150Å) InxGa1-xP multiquantum wire array grown via a strain-induced laterally ordered process.

Original languageEnglish (US)
Pages (from-to)1072-1074
Number of pages3
JournalApplied Physics Letters
Volume72
Issue number9
DOIs
StatePublished - 1998

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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