A novel MEMS-based technique for in-situ characterization of freestanding nanometer scale thin films inside SEM and TEM

M. A. Haque, M. T.A. Saif

Research output: Contribution to conferencePaper

Abstract

We present a MEMS-based technique for in-situ uniaxial tensile testing of freestanding thin films inside SEM and TEM. v It integrates a freestanding thin film specimen with MEMS force sensors and structures to produce an on-chip tensile testing facility. Cofabrication of the specimen with force and displacement measuring mechanisms produces the following unique features: 1) Quantitative experimentation can be carried out in both SEM and TEM, 2) No extra gripping mechanism is required, 3) Specimen misalignment can be eliminated, 4) Prestress in specimen can be determined, and 5) Specimens with micrometer to nanometer thickness can be tested. We demonstrate the technique by testing a 200-nanometer thick Aluminum specimen in-situ in SEM. Significant strengthening and anelasticity were observed at this size scale.

Original languageEnglish (US)
Pages2589-2594
Number of pages6
StatePublished - Dec 1 2001
Event2001 ASME International Mechanical Engineering Congress and Exposition - New York, NY, United States
Duration: Nov 11 2001Nov 16 2001

Other

Other2001 ASME International Mechanical Engineering Congress and Exposition
CountryUnited States
CityNew York, NY
Period11/11/0111/16/01

Fingerprint

MEMS
Tensile testing
Transmission electron microscopy
Thin films
Scanning electron microscopy
Aluminum
Sensors
Testing

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Haque, M. A., & Saif, M. T. A. (2001). A novel MEMS-based technique for in-situ characterization of freestanding nanometer scale thin films inside SEM and TEM. 2589-2594. Paper presented at 2001 ASME International Mechanical Engineering Congress and Exposition, New York, NY, United States.

A novel MEMS-based technique for in-situ characterization of freestanding nanometer scale thin films inside SEM and TEM. / Haque, M. A.; Saif, M. T.A.

2001. 2589-2594 Paper presented at 2001 ASME International Mechanical Engineering Congress and Exposition, New York, NY, United States.

Research output: Contribution to conferencePaper

Haque, MA & Saif, MTA 2001, 'A novel MEMS-based technique for in-situ characterization of freestanding nanometer scale thin films inside SEM and TEM' Paper presented at 2001 ASME International Mechanical Engineering Congress and Exposition, New York, NY, United States, 11/11/01 - 11/16/01, pp. 2589-2594.
Haque MA, Saif MTA. A novel MEMS-based technique for in-situ characterization of freestanding nanometer scale thin films inside SEM and TEM. 2001. Paper presented at 2001 ASME International Mechanical Engineering Congress and Exposition, New York, NY, United States.
Haque, M. A. ; Saif, M. T.A. / A novel MEMS-based technique for in-situ characterization of freestanding nanometer scale thin films inside SEM and TEM. Paper presented at 2001 ASME International Mechanical Engineering Congress and Exposition, New York, NY, United States.6 p.
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