@inproceedings{4e2cd53985d648e59c19170586b18057,
title = "A novel characterization method for temperature compensation of composite resonators",
abstract = "We develop an efficient characterization method for temperature compensated micromechanical resonators by employing empirical data analysis with an a priori model. We have previously demonstrated that electrostatic-tuning of a composite resonator with an accurate lookup table can achieve a temperature stability of ±3.2 ppm, but this characterization method was not suitable for commercialization since it required measurements at every temperature point of interest. This paper presents a technique that can reduce the number of temperature points for calibration by 67% without compromising accuracy. We also demonstrate a one-point calibration method with which ±7 ppm calibration error can be achieved using a single temperature point measurement.",
author = "Lee, {Hyung Kyu} and Shingo Yoneoka and Gaurav Bahl and James Salvia and Qu, {Yu Qiao} and Renata Melamud and Saurabh Chandorkar and Bongsang Kim and Hopcroft, {Matthew A.} and Kenny, {Thomas W.}",
year = "2010",
doi = "10.1109/MEMSYS.2010.5442299",
language = "English (US)",
isbn = "9781424457649",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
pages = "743--746",
booktitle = "MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest",
note = "23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 ; Conference date: 24-01-2010 Through 28-01-2010",
}