A novel characterization method for temperature compensation of composite resonators

Hyung Kyu Lee, Shingo Yoneoka, Gaurav Bahl, James Salvia, Yu Qiao Qu, Renata Melamud, Saurabh Chandorkar, Bongsang Kim, Matthew A. Hopcroft, Thomas W. Kenny

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We develop an efficient characterization method for temperature compensated micromechanical resonators by employing empirical data analysis with an a priori model. We have previously demonstrated that electrostatic-tuning of a composite resonator with an accurate lookup table can achieve a temperature stability of ±3.2 ppm, but this characterization method was not suitable for commercialization since it required measurements at every temperature point of interest. This paper presents a technique that can reduce the number of temperature points for calibration by 67% without compromising accuracy. We also demonstrate a one-point calibration method with which ±7 ppm calibration error can be achieved using a single temperature point measurement.

Original languageEnglish (US)
Title of host publicationMEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages743-746
Number of pages4
DOIs
StatePublished - Jun 1 2010
Externally publishedYes
Event23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China
Duration: Jan 24 2010Jan 28 2010

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
CountryChina
CityHong Kong
Period1/24/101/28/10

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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