A novel approach for determining pull-in voltages in micro-electro- mechanical systems (MEMS)

D. S. Long, M. A. Shannon, N. R. Aluru

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper we introduce a novel method, based on the Lagrange Multiplier Method (LMM), for calculating pull-in voltages in MEMS. This method combines the finite-element with a displacement constraint and boundary element method. The sign of the lagrange multiplier will be the criterion used to identify when the conductors come into contact. The validity of this numerical approach is demonstrated by two simple examples along with comparison to previously published data.

Original languageEnglish (US)
Title of host publication2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000
EditorsM. Laudon, B. Romanowicz
Pages481-484
Number of pages4
StatePublished - Dec 1 2000
Externally publishedYes
Event2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000 - San Diego, CA, United States
Duration: Mar 27 2000Mar 29 2000

Publication series

Name2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Other

Other2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000
CountryUnited States
CitySan Diego, CA
Period3/27/003/29/00

Keywords

  • Lagrange Multiplier Method
  • MEMS
  • Pull-In Voltage
  • Two-Dimensional Electrostatic Analysis

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Long, D. S., Shannon, M. A., & Aluru, N. R. (2000). A novel approach for determining pull-in voltages in micro-electro- mechanical systems (MEMS). In M. Laudon, & B. Romanowicz (Eds.), 2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000 (pp. 481-484). (2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000).