A new approach to lattice parameter measurements using dynamic electron diffraction and pattern matching

J. M. Zuo, Miyoung Kim, Randi Holmestad

Research output: Contribution to journalArticle

Abstract

We describe a new approach based on pattern matching for lattice parameter measurements using convergent beam electron diffraction (CBED). Theoretical CBED patterns are calculated using the Bloch wave method. Both experimental and theoretical patterns are processed to enhance the geometric features, and then compared using correlation. By including the dynamic and thickness effects in the simulation, the method is general. It can be applied to both small and large unit cell crystals and zone-axis and off-zone axis orientations. Applications to SiC 4H and Cu2O show that the method is highly accurate.

Original languageEnglish (US)
Pages (from-to)121-127
Number of pages7
JournalJournal of Electron Microscopy
Volume47
Issue number2
DOIs
StatePublished - Jan 1 1998
Externally publishedYes

Keywords

  • Dynamic electron diffraction
  • Pattern matching

ASJC Scopus subject areas

  • Instrumentation

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