A new acceleration-based methodology for micro/meso-scale machine tool performance evaluation

Andrew G. Phillip, Shiv G. Kapoor, Richard E. DeVor

Research output: Contribution to journalArticlepeer-review


Micro-machining and micro/meso-scale machine tools (mMTs) use substantially different motion parameters than those used at the macro-scale. A new acceleration-based mMT performance evaluation methodology is developed based on an assessment of motion parameters, and in particular, unique acceleration requirements at the micro-scale. Performance evaluations using the new methodology are carried out on two prototype mMTs. Following errors are found for the most part to increase linearly with acceleration. The closed loop bandwidth is found to be the current major factor affecting acceleration capability for the machines tested. A linear model linking servo-update frequency, closed-loop bandwidth, acceleration and following error is proposed. The model results provide a basis for prescribing maximum acceleration values to maintain 10-2-10-3 relative accuracy. Future mMT component performance requirements are explored.

Original languageEnglish (US)
Pages (from-to)1435-1444
Number of pages10
JournalInternational Journal of Machine Tools and Manufacture
Issue number12-13
StatePublished - Oct 2006


  • Acceleration requirements
  • Micro-machining motion parameters
  • Micro/meso-scale machine tool
  • Performance evaluation

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering


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