@inproceedings{bf1298af2d6245d39d4871f9b8e200be,
title = "A near Zero TCF Acoustic Resonator with High Electromechanical Coupling of 13.5% at 3.5 GHz",
abstract = "In this paper, the design, implementation, and measurements of a near-zero temperature coefficient of frequency (TCF) acoustic resonator are demonstrated. The acoustic resonator is based on laterally vibrating Lamb-waves in a bimorph composed of Lithium Niobate and Silicon Dioxide. The resonator is optimized for the A3 mode by adjusting the thickness of different materials in the bimorph to maximize the coupling and minimize the TCF simultaneously. The optimization resulted in ultra-low TCF of-1.1 ppm/°C, a high electromechanical coupling of 13.5%, and a good quality factor of 500 at 3.5 GHz. The achieved specifications are adequate for 5G sub-6 GHz frequency bands n77 and n78.",
keywords = "5G, acoustic resonators, electromechanical coupling, zero TCF",
author = "Hassanien, {Ahmed E.} and Ruochen Lu and Songbin Gong",
note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 2021 IEEE MTT-S International Microwave Symposium, IMS 2021 ; Conference date: 07-06-2021 Through 25-06-2021",
year = "2021",
month = jun,
day = "7",
doi = "10.1109/IMS19712.2021.9574959",
language = "English (US)",
series = "IEEE MTT-S International Microwave Symposium Digest",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "218--221",
booktitle = "2021 IEEE MTT-S International Microwave Symposium, IMS 2021",
address = "United States",
}