A multiscale systems approach to microelectronic processes

Richard D. Braatz, Richard C. Alkire, Edmund G. Seebauer, Timothy O. Drews, Effendi Rusli, Mohan Karulkar, Feng Xue, Yan Qin, Michael Y.L. Jung, Rudiyanto Gunawan

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'A multiscale systems approach to microelectronic processes'. Together they form a unique fingerprint.

Keyphrases

Engineering