A multiscale systems approach to microelectronic processes

Richard D. Braatz, Richard C. Alkire, Edmund G. Seebauer, Timothy O. Drews, Effendi Rusli, Mohan Karulkar, Feng Xue, Yan Qin, Michael Y.L. Jung, Rudiyanto Gunawan

Research output: Contribution to journalArticlepeer-review


This paper describes applications of molecular simulation to microelectronics processes and the subsequent development of techniques for multiscale simulation and multiscale systems engineering. The progression of the applications of simulation in the semiconductor industry from macroscopic to molecular to multiscale is reviewed. Multiscale systems are presented as an approach that incorporates molecular and multiscale simulation to design processes that control events at the molecular scale while simultaneously optimizing all length scales from the molecular to the macroscopic. It is discussed how design and control problems in microelectronics and nanotechnology, including the targeted design of processes and products at the molecular scale, can be addressed using the multiscale systems tools. This provides a framework for addressing the "grand challenge" of nanotechnology: how to move nanoscale science and technology from art to an engineering discipline.

Original languageEnglish (US)
Pages (from-to)1643-1656
Number of pages14
JournalComputers and Chemical Engineering
Issue number10-12
StatePublished - Sep 12 2006


  • Microelectronics processes
  • Multiscale systems
  • Semiconductor processes

ASJC Scopus subject areas

  • General Chemical Engineering
  • Computer Science Applications


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