A microsensor based on a microcantilever patterned with an environmentally sensitive hydrogel

A process was developed for patterning thin films of environmentally sensitive hydrogels onto silicon microcantilevers. Microcantilevers have been shown to be ultra-sensitive transducers for chemical, physical, and biological microsensors. By patterning environmentally sensitive hydrogels onto silicon microcantilevers, novel microsensors were prepared for MEMS and BioMEMS applications. Specifically, a cross-linked poly(methacrylic acid) (PMAA) network containing significant amounts of poly(ethylene glycol) dimethacrylate (PEGDMA) was studied. This hydrogel exhibits a swelling dependence on pH. By increasing the environmental pH above the pK_a of PMAA to cause ionization of the carboxylic acid groups, electrostatic repulsion is produced along the main polymer chain causing the polymer network to expand and swell. Therefore, a pH change induces swelling or shrinking of the polymer network and creates stress on the microcantilever surface causing it to bend. In this study, silicon microcantilevers were fabricated on p-type (100) SOI wafers. Covalent adhesion was gained between the polymer and the silicon surface through the modification of the silicon surface with γ-methacryloxypropyl trimethoxysilane. Hydrogels were patterned onto the silicon microcantilevers utilizing a mask aligner to allow for precise positioning. The micropatterned hydrogels were analyzed using optical microscopy and profilometry. The bending response of patterned cantilevers with a change in environmental pH was observed, providing proof-of-concept for a MEMS/BioMEMS sensor based on microcantilevers patterned with environmentally sensitive hydrogels.