A microfabricated, low dark current a-Se detector for measurement of microplasma optical emission in the UV for possible use on-site

Shiva Abbaszadeh, Karim S. Karim, Vassili Karanassios

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Traditionally, samples are collected on-site (i.e., in the field) and are shipped to a lab for chemical analysis. An alternative is offered by using portable chemical analysis instruments that can be used on-site (i.e., in the field). Many analytical measurements by optical emission spectrometry require use of light-sources and of spectral lines that are in the Ultra-Violet (UV, ∼200 nm - 400 nm wavelength) region of the spectrum. For such measurements, a portable, battery-operated, fiber-optic spectrometer equipped with an un-cooled, linear, solid-state detector may be used. To take full advantage of the advanced measurement capabilities offered by state-of-the-art solid-state detectors, cooling of the detector is required. But cooling and other thermal management hamper portability and use on-site because they add size and weight and they increase electrical power requirements. To address these considerations, an alternative was implemented, as described here. Specifically, a microfabricated solid-state detector for measurement of UV photons will be described. Unlike solid-state detectors developed on crystalline Silicon, this miniaturized and low-cost detector utilizes amorphous Selenium (a-Se) as its photosensitive material. Due to its low dark current, this detector does not require cooling, thus it is better suited for portable use and for chemical measurements on-site. In this paper, a microplasma will be used as a light-source of UVphotons for the a-Se detector. For example, spectra acquired using a microplasma as a light-source will be compared with those obtained with a portable, fiber-optic spectrometer equipped with a Si-based 2080-element detector. And, analytical performance obtained by introducing ng-amounts of analytes into the microplasma will be described.

Original languageEnglish (US)
Title of host publicationNext-Generation Spectroscopic Technologies VI
StatePublished - 2013
Externally publishedYes
EventNext-Generation Spectroscopic Technologies VI - Baltimore, MD, United States
Duration: Apr 29 2013Apr 30 2013

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


OtherNext-Generation Spectroscopic Technologies VI
Country/TerritoryUnited States
CityBaltimore, MD


  • A-Se detector
  • Microplasma
  • On-site chemical analysis
  • Portable optical spectrometer
  • Solid-state sensor
  • UV

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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