Keyphrases
Lithium Niobate
100%
Resonator Array
100%
MEMS Resonator
100%
Resonant Mode
66%
Resonant Frequency
66%
Temperature Range
33%
High Temperature
33%
Acoustics
33%
Temperature Effect
33%
Room Temperature
33%
Treatment Device
33%
Radio Frequency
33%
Device Performance
33%
In Situ High Temperature
33%
Resonant Sensor
33%
Materials Platforms
33%
After High Temperature
33%
Work Support
33%
Recoverability
33%
Harsh Environment
33%
Quality Factor (Q-factor)
33%
Temperature Coefficient of Frequency
33%
High-temperature Characteristics
33%
Shear Horizontal
33%
Electromechanical Coupling Coefficient
33%
Burn-in
33%
SH0 Mode
33%
High Temperature Test
33%
Engineering
Microelectromechanical System
100%
Quality Factor
100%
Resonator
100%
Piezoelectric
100%
Resonant Mode
100%
Resonant Frequency
100%
Temperature Range
50%
Room Temperature
50%
Radio Frequency
50%
Device Performance
50%
Temperature Coefficient
50%
Resonant Sensor
50%
Coupling Coefficient
50%
High Temperature Testing
50%
Material Science
Microelectromechanical System
100%
Resonator
100%
Piezoelectricity
100%
Lithium Niobate
100%
Electromechanical Coupling
50%