A high-stability MEMS frequency reference

M. A. Hopcroft; H. K. Lee; B. Kim; R. Melamud; S. Chandorkar; M. Agarwal; C. M. Jha; J. Salvia; G. Bahl; H. Mehta; T. W. Kenny

doi:10.1109/SENSOR.2007.4300378

A high-stability MEMS frequency reference

M. A. Hopcroft, H. K. Lee, B. Kim, R. Melamud, S. Chandorkar, M. Agarwal, C. M. Jha, J. Salvia, G. Bahl, H. Mehta, T. W. Kenny

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Silicon MEMS resonators with high levels of frequency stability are demonstrated in an oscillator system suitable for use as a frequency reference. The use of resonator quality factor (Q) as a temperature sensor allows us to control the temperature of the resonator with milli-degree precision, thus stabilizing the output frequency of the resonator to ∼0.1 ppm. Composite Si/SiO₂ resonator design has reduced the inherent frequency sensitivity of the resonator. The combination of Q(T) temperature stabilization and composite resonator design has reduced the frequency variation to ∼0.01 ppm, a level that is competitive with high-performance commercial devices.

Original language	English (US)
Title of host publication	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	1307-1309
Number of pages	3
DOIs	https://doi.org/10.1109/SENSOR.2007.4300378
State	Published - 2007
Externally published	Yes
Event	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France Duration: Jun 10 2007 → Jun 14 2007

Publication series

Name	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country/Territory	France
City	Lyon
Period	6/10/07 → 6/14/07

Keywords

Frequency reference
Oscillator
Silicon
Silicon dioxide
Temperature sensitivity

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

Online availability

10.1109/SENSOR.2007.4300378

Library availability

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Hopcroft, M. A., Lee, H. K., Kim, B., Melamud, R., Chandorkar, S., Agarwal, M., Jha, C. M., Salvia, J., Bahl, G., Mehta, H., & Kenny, T. W. (2007). A high-stability MEMS frequency reference. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1307-1309). Article 4300378 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2007.4300378

A high-stability MEMS frequency reference. / Hopcroft, M. A.; Lee, H. K.; Kim, B. et al.
TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 1307-1309 4300378 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Hopcroft, MA, Lee, HK, Kim, B, Melamud, R, Chandorkar, S, Agarwal, M, Jha, CM, Salvia, J, Bahl, G, Mehta, H & Kenny, TW 2007, A high-stability MEMS frequency reference. in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300378, TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 1307-1309, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 6/10/07. https://doi.org/10.1109/SENSOR.2007.4300378

Hopcroft MA, Lee HK, Kim B, Melamud R, Chandorkar S, Agarwal M et al. A high-stability MEMS frequency reference. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 1307-1309. 4300378. (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). doi: 10.1109/SENSOR.2007.4300378

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abstract = "Silicon MEMS resonators with high levels of frequency stability are demonstrated in an oscillator system suitable for use as a frequency reference. The use of resonator quality factor (Q) as a temperature sensor allows us to control the temperature of the resonator with milli-degree precision, thus stabilizing the output frequency of the resonator to ∼0.1 ppm. Composite Si/SiO2 resonator design has reduced the inherent frequency sensitivity of the resonator. The combination of Q(T) temperature stabilization and composite resonator design has reduced the frequency variation to ∼0.01 ppm, a level that is competitive with high-performance commercial devices.",

keywords = "Frequency reference, Oscillator, Silicon, Silicon dioxide, Temperature sensitivity",

author = "Hopcroft, {M. A.} and Lee, {H. K.} and B. Kim and R. Melamud and S. Chandorkar and M. Agarwal and Jha, {C. M.} and J. Salvia and G. Bahl and H. Mehta and Kenny, {T. W.}",

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AU - Hopcroft, M. A.

AU - Lee, H. K.

AU - Kim, B.

AU - Melamud, R.

AU - Chandorkar, S.

AU - Agarwal, M.

AU - Jha, C. M.

AU - Salvia, J.

AU - Bahl, G.

AU - Mehta, H.

AU - Kenny, T. W.

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AB - Silicon MEMS resonators with high levels of frequency stability are demonstrated in an oscillator system suitable for use as a frequency reference. The use of resonator quality factor (Q) as a temperature sensor allows us to control the temperature of the resonator with milli-degree precision, thus stabilizing the output frequency of the resonator to ∼0.1 ppm. Composite Si/SiO2 resonator design has reduced the inherent frequency sensitivity of the resonator. The combination of Q(T) temperature stabilization and composite resonator design has reduced the frequency variation to ∼0.01 ppm, a level that is competitive with high-performance commercial devices.

KW - Frequency reference

KW - Oscillator

KW - Silicon

KW - Silicon dioxide

KW - Temperature sensitivity

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Y2 - 10 June 2007 through 14 June 2007

ER -

A high-stability MEMS frequency reference

Abstract

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Keywords

ASJC Scopus subject areas

Online availability

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