A high-stability MEMS frequency reference

M. A. Hopcroft, H. K. Lee, B. Kim, R. Melamud, S. Chandorkar, M. Agarwal, C. M. Jha, J. Salvia, G. Bahl, H. Mehta, T. W. Kenny

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Silicon MEMS resonators with high levels of frequency stability are demonstrated in an oscillator system suitable for use as a frequency reference. The use of resonator quality factor (Q) as a temperature sensor allows us to control the temperature of the resonator with milli-degree precision, thus stabilizing the output frequency of the resonator to ∼0.1 ppm. Composite Si/SiO2 resonator design has reduced the inherent frequency sensitivity of the resonator. The combination of Q(T) temperature stabilization and composite resonator design has reduced the frequency variation to ∼0.01 ppm, a level that is competitive with high-performance commercial devices.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages1307-1309
Number of pages3
DOIs
StatePublished - Dec 1 2007
Externally publishedYes
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: Jun 10 2007Jun 14 2007

Publication series

NameTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country/TerritoryFrance
CityLyon
Period6/10/076/14/07

Keywords

  • Frequency reference
  • Oscillator
  • Silicon
  • Silicon dioxide
  • Temperature sensitivity

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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