A hard X-ray KB-FZP microscope for tomography with Sub-100-nm resolution

C. Rau, V. Crecea, C. P. Richter, K. M. Peterson, P. R. Jemian, U. Neuhäusler, G. Schneider, X. Yu, P. V. Braun, T. C. Chiang, I. K. Robinson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An instrument for high-resolution imaging and tomography has been built at the APS beamline 34 ID-C, Argonne National Laboratory. In-line phase contrast tomography can be performed with micrometer resolution. For imaging and tomography with resolution better than 100nm a hard X-ray microscope has been integrated to the instrument. It works with a Kirkpatrick-Baez (KB) mirror as condenser and a Fresnel-Zone plate (FZP) as an objective lens. 50 nm-features have been resolved in a Nickel structure operating the microscope at a photon energy of 9keV. Phase objects with negligible absorption contrast have been imaged. Tomography scans were performed on photonic crystals.

Original languageEnglish (US)
Title of host publicationDevelopments in X-Ray Tomography V
DOIs
StatePublished - 2006
EventDevelopments in X-Ray Tomography V - San Diego, CA, United States
Duration: Aug 15 2006Aug 17 2006

Publication series

NameProgress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume6318
ISSN (Print)1605-7422

Other

OtherDevelopments in X-Ray Tomography V
CountryUnited States
CitySan Diego, CA
Period8/15/068/17/06

Keywords

  • Fresnel zone plate
  • Full-field microscopy
  • Hard x-rays
  • Kirkpatrick-baez mirror
  • Tomography

ASJC Scopus subject areas

  • Engineering(all)

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