A hard X-ray KB-FZP microscope for tomography with Sub-100-nm resolution

C. Rau; V. Crecea; C. P. Richter; K. M. Peterson; P. R. Jemian; U. Neuhäusler; G. Schneider; X. Yu; P. V. Braun; T. C. Chiang; I. K. Robinson

doi:10.1117/12.680975

A hard X-ray KB-FZP microscope for tomography with Sub-100-nm resolution

C. Rau, V. Crecea, C. P. Richter, K. M. Peterson, P. R. Jemian, U. Neuhäusler, G. Schneider, X. Yu, P. V. Braun, T. C. Chiang, I. K. Robinson

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

An instrument for high-resolution imaging and tomography has been built at the APS beamline 34 ID-C, Argonne National Laboratory. In-line phase contrast tomography can be performed with micrometer resolution. For imaging and tomography with resolution better than 100nm a hard X-ray microscope has been integrated to the instrument. It works with a Kirkpatrick-Baez (KB) mirror as condenser and a Fresnel-Zone plate (FZP) as an objective lens. 50 nm-features have been resolved in a Nickel structure operating the microscope at a photon energy of 9keV. Phase objects with negligible absorption contrast have been imaged. Tomography scans were performed on photonic crystals.

Original language	English (US)
Title of host publication	Developments in X-Ray Tomography V
DOIs	https://doi.org/10.1117/12.680975
State	Published - 2006
Event	Developments in X-Ray Tomography V - San Diego, CA, United States Duration: Aug 15 2006 → Aug 17 2006

Publication series

Name	Progress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume	6318
ISSN (Print)	1605-7422

Other

Other	Developments in X-Ray Tomography V
Country/Territory	United States
City	San Diego, CA
Period	8/15/06 → 8/17/06

Keywords

Fresnel zone plate
Full-field microscopy
Hard x-rays
Kirkpatrick-baez mirror
Tomography

ASJC Scopus subject areas

General Engineering

Online availability

10.1117/12.680975

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Rau, C., Crecea, V., Richter, C. P., Peterson, K. M., Jemian, P. R., Neuhäusler, U., Schneider, G., Yu, X., Braun, P. V., Chiang, T. C., & Robinson, I. K. (2006). A hard X-ray KB-FZP microscope for tomography with Sub-100-nm resolution. In Developments in X-Ray Tomography V Article 63181G (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; Vol. 6318). https://doi.org/10.1117/12.680975

Rau, C, Crecea, V, Richter, CP, Peterson, KM, Jemian, PR, Neuhäusler, U, Schneider, G, Yu, X, Braun, PV, Chiang, TC & Robinson, IK 2006, A hard X-ray KB-FZP microscope for tomography with Sub-100-nm resolution. in Developments in X-Ray Tomography V., 63181G, Progress in Biomedical Optics and Imaging - Proceedings of SPIE, vol. 6318, Developments in X-Ray Tomography V, San Diego, CA, United States, 8/15/06. https://doi.org/10.1117/12.680975

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abstract = "An instrument for high-resolution imaging and tomography has been built at the APS beamline 34 ID-C, Argonne National Laboratory. In-line phase contrast tomography can be performed with micrometer resolution. For imaging and tomography with resolution better than 100nm a hard X-ray microscope has been integrated to the instrument. It works with a Kirkpatrick-Baez (KB) mirror as condenser and a Fresnel-Zone plate (FZP) as an objective lens. 50 nm-features have been resolved in a Nickel structure operating the microscope at a photon energy of 9keV. Phase objects with negligible absorption contrast have been imaged. Tomography scans were performed on photonic crystals.",

keywords = "Fresnel zone plate, Full-field microscopy, Hard x-rays, Kirkpatrick-baez mirror, Tomography",

author = "C. Rau and V. Crecea and Richter, {C. P.} and Peterson, {K. M.} and Jemian, {P. R.} and U. Neuh{\"a}usler and G. Schneider and X. Yu and Braun, {P. V.} and Chiang, {T. C.} and Robinson, {I. K.}",

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AU - Crecea, V.

AU - Richter, C. P.

AU - Peterson, K. M.

AU - Jemian, P. R.

AU - Neuhäusler, U.

AU - Schneider, G.

AU - Yu, X.

AU - Braun, P. V.

AU - Chiang, T. C.

AU - Robinson, I. K.

PY - 2006

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N2 - An instrument for high-resolution imaging and tomography has been built at the APS beamline 34 ID-C, Argonne National Laboratory. In-line phase contrast tomography can be performed with micrometer resolution. For imaging and tomography with resolution better than 100nm a hard X-ray microscope has been integrated to the instrument. It works with a Kirkpatrick-Baez (KB) mirror as condenser and a Fresnel-Zone plate (FZP) as an objective lens. 50 nm-features have been resolved in a Nickel structure operating the microscope at a photon energy of 9keV. Phase objects with negligible absorption contrast have been imaged. Tomography scans were performed on photonic crystals.

AB - An instrument for high-resolution imaging and tomography has been built at the APS beamline 34 ID-C, Argonne National Laboratory. In-line phase contrast tomography can be performed with micrometer resolution. For imaging and tomography with resolution better than 100nm a hard X-ray microscope has been integrated to the instrument. It works with a Kirkpatrick-Baez (KB) mirror as condenser and a Fresnel-Zone plate (FZP) as an objective lens. 50 nm-features have been resolved in a Nickel structure operating the microscope at a photon energy of 9keV. Phase objects with negligible absorption contrast have been imaged. Tomography scans were performed on photonic crystals.

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KW - Full-field microscopy

KW - Hard x-rays

KW - Kirkpatrick-baez mirror

KW - Tomography

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T3 - Progress in Biomedical Optics and Imaging - Proceedings of SPIE

BT - Developments in X-Ray Tomography V

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A hard X-ray KB-FZP microscope for tomography with Sub-100-nm resolution

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