Abstract
An efficient algorithm for self-consistent analysis of 3-D microelectro-mechanical-systems (MEMS) is described. The algorithm employs a hybrid finite-element/boundary-element technique for coupled mechanical and electrical analysis. The coupled algorithm is shown to converge rapidly and is much faster than relaxation for tightly coupled problems.
Original language | English |
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Title of host publication | American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC |
Pages | 275-280 |
Number of pages | 6 |
Volume | 59 |
State | Published - 1996 |
Externally published | Yes |
ASJC Scopus subject areas
- Software
- Mechanical Engineering