A coupled numerical technique for self-consistent analysis of micro-electro-mechanical-systems

Narayana R Aluru, J. White

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

An efficient algorithm for self-consistent analysis of 3-D microelectro-mechanical-systems (MEMS) is described. The algorithm employs a hybrid finite-element/boundary-element technique for coupled mechanical and electrical analysis. The coupled algorithm is shown to converge rapidly and is much faster than relaxation for tightly coupled problems.

Original languageEnglish
Title of host publicationAmerican Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC
Pages275-280
Number of pages6
Volume59
StatePublished - Dec 1 1996
Externally publishedYes

ASJC Scopus subject areas

  • Software
  • Mechanical Engineering

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