An efficient algorithm for self-consistent analysis of 3-D microelectro-mechanical-systems (MEMS) is described. The algorithm employs a hybrid finite-element/boundary-element technique for coupled mechanical and electrical analysis. The coupled algorithm is shown to converge rapidly and is much faster than relaxation for tightly coupled problems.
|Title of host publication||American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC|
|Number of pages||6|
|State||Published - 1996|
ASJC Scopus subject areas
- Mechanical Engineering