Abstract
An efficient algorithm for self-consistent analysis of 3-D microelectro-mechanical-systems (MEMS) is described. The algorithm employs a hybrid finite-element/boundary-element technique for coupled mechanical and electrical analysis. The coupled algorithm is shown to converge rapidly and is much faster than relaxation for tightly coupled problems.
| Original language | English |
|---|---|
| Title of host publication | American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC |
| Pages | 275-280 |
| Number of pages | 6 |
| Volume | 59 |
| State | Published - Dec 1 1996 |
| Externally published | Yes |
ASJC Scopus subject areas
- Software
- Mechanical Engineering