@inproceedings{d80d661790b8494a86c454fd23b0c17a,
title = "A coupled circuit and device simulator for design of RF MEMS VCOs",
abstract = "A new coupled circuit and electrostatic/mechanical simulator is presented for the design of RF MEMS VCOs. The numerical solution of device level equations is used to accurately compute the capacitance of the MEMS capacitor. This coupled with a circuit simulator facilitates the simulation of circuits incorporating MEMS capacitors. Simulations of a 2.4 GHz VCO implemented in a UP 0.5 μm CMOS technology show good agreement with experimentally observed behavior.",
keywords = "CMOS technology, Capacitance, Capacitors, Circuit simulation, Computational modeling, Coupling circuits, Electrostatics, Equations, Micromechanical devices, Radiofrequency microelectromechanical systems",
author = "M. Behera and S. De and N. Aluru and K. Mayaram",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 ; Conference date: 12-08-2003 Through 14-08-2003",
year = "2003",
doi = "10.1109/NANO.2003.1231789",
language = "English (US)",
series = "Proceedings of the IEEE Conference on Nanotechnology",
publisher = "IEEE Computer Society",
pages = "347--350",
booktitle = "2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - Proceedings",
}