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A compact model for dielectric charging in RF MEMS capacitive switches
Prasad S. Sumant
, Narayana R. Aluru
, Andreas C. Cangellaris
Coordinated Science Lab
Research output
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Article
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peer-review
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Keyphrases
Compact Model
100%
Radio Frequency Microelectromechanical Systems (RF MEMS)
100%
Dielectric Charging
100%
Capacitive Switch
100%
Integrated Circuits
40%
Simulation Program
40%
Quantitative Characterization
20%
Circuit Simulator
20%
Physics-based
20%
System Level
20%
Nonlinear Behavior
20%
One-dimensional Model
20%
Computer-aided Analysis
20%
Efficient Simulation
20%
Performance Degradation
20%
Design Tools
20%
Charging Process
20%
Computer-aided Design
20%
Nonlinear Simulation
20%
Switching Performance
20%
Voltage Waveform
20%
Control Voltage
20%
Complex Control
20%
Engineering
Micro-Electro-Mechanical System
100%
Radio Frequency
100%
Dielectrics
100%
Capacitive
100%
Simulation Program
40%
Integrated Circuit
40%
Microelectromechanical System
20%
One Dimensional
20%
Model Parameter
20%
Dimensional Model
20%
Computer Aided Analysis
20%
Performance Degradation
20%
Charging Process
20%
Nonlinear Behavior
20%
Voltage Waveform
20%
Design Tool
20%
Computer Aided Design
20%
Physics
Microelectromechanical System
100%
Dielectric Material
100%
Integrated Circuit
40%
Physics
20%
Microelectromechanical System
20%