A Chip-Scale RF MEMS Gyrator via Hybridizing Lorentz-Force and Piezoelectric Transductions

Tao Wu, Ruochen Lu, Anming Gao, Cheng Tu, Tomas Manzaneque, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents the design and experimental results of the first chip-scale radio frequency MEMS gyrator based on hybridizing Lorentz-force and piezoelectric transduction. The MEMS gyrator has a non-reciprocal phase response of 180° and can be used as the building blocks for synthesizing complex non-reciprocal networks. The equivalent circuit and measured performance of a fabricated MEMS gyrator are presented, both showing the anticipated 180° phase difference. The demonstration marks the first time that non-reciprocity is attained at radio frequencies with an entirely passive chip-scale mechanical device. Various challenges in achieving strong coupling and low insertion loss for the designed devices will be discussed.

Original languageEnglish (US)
Title of host publication2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages887-890
Number of pages4
ISBN (Electronic)9781728116105
DOIs
StatePublished - Jan 2019
Event32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of
Duration: Jan 27 2019Jan 31 2019

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2019-January
ISSN (Print)1084-6999

Conference

Conference32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
CountryKorea, Republic of
CitySeoul
Period1/27/191/31/19

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'A Chip-Scale RF MEMS Gyrator via Hybridizing Lorentz-Force and Piezoelectric Transductions'. Together they form a unique fingerprint.

  • Cite this

    Wu, T., Lu, R., Gao, A., Tu, C., Manzaneque, T., & Gong, S. (2019). A Chip-Scale RF MEMS Gyrator via Hybridizing Lorentz-Force and Piezoelectric Transductions. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 887-890). [8870764] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2019.8870764