A C-band Lithium Niobate MEMS Filter with 10% Fractional Bandwidth for 5G Front-ends

Yansong Yang, Ruochen Lu, Liuqing Gao, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a new class of micro-electromechanical system (MEMS) C-band filters for 5G front-ends. The filter is comprised of resonators based on the first-order asymmetric Lamb wave (A1) mode in thin-film lithium niobate. The fabricated filter has been demonstrated at 4.5 GHz with sharp roll-off, flat in-band group delay, and spurious-free response over a wide frequency range. Specifically, the filter shows a 3-dB fractional bandwidth (FBW) of 10%, an insertion loss (IL) of 1.7 dB, an out-of-band (OoB) rejection of -13 dB, and a compact footprint of 0.36 mm2. The demonstrations herein mark the largest fractional bandwidth (FBW) achieved for acoustic-only filters at 5G frequencies.

Original languageEnglish (US)
Title of host publication2019 IEEE International Ultrasonics Symposium, IUS 2019
PublisherIEEE Computer Society
Pages849-852
Number of pages4
ISBN (Electronic)9781728145969
DOIs
StatePublished - Oct 2019
Event2019 IEEE International Ultrasonics Symposium, IUS 2019 - Glasgow, United Kingdom
Duration: Oct 6 2019Oct 9 2019

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2019-October
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2019 IEEE International Ultrasonics Symposium, IUS 2019
CountryUnited Kingdom
CityGlasgow
Period10/6/1910/9/19

Keywords

  • 5G front-ends
  • Acoustic
  • C-band
  • Filters
  • Lithium niobate
  • MEMS
  • New radio
  • Resonators
  • Spurious modes suppression.

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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