@inproceedings{8ad6cc6d1dd94e3abacc6c5b441f80e4,
title = "A C-band Lithium Niobate MEMS Filter with 10% Fractional Bandwidth for 5G Front-ends",
abstract = "This paper presents a new class of micro-electromechanical system (MEMS) C-band filters for 5G front-ends. The filter is comprised of resonators based on the first-order asymmetric Lamb wave (A1) mode in thin-film lithium niobate. The fabricated filter has been demonstrated at 4.5 GHz with sharp roll-off, flat in-band group delay, and spurious-free response over a wide frequency range. Specifically, the filter shows a 3-dB fractional bandwidth (FBW) of 10%, an insertion loss (IL) of 1.7 dB, an out-of-band (OoB) rejection of -13 dB, and a compact footprint of 0.36 mm2. The demonstrations herein mark the largest fractional bandwidth (FBW) achieved for acoustic-only filters at 5G frequencies.",
keywords = "5G front-ends, Acoustic, C-band, Filters, Lithium niobate, MEMS, New radio, Resonators, Spurious modes suppression.",
author = "Yansong Yang and Ruochen Lu and Liuqing Gao and Songbin Gong",
note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 2019 IEEE International Ultrasonics Symposium, IUS 2019 ; Conference date: 06-10-2019 Through 09-10-2019",
year = "2019",
month = oct,
doi = "10.1109/ULTSYM.2019.8926299",
language = "English (US)",
series = "IEEE International Ultrasonics Symposium, IUS",
publisher = "IEEE Computer Society",
pages = "849--852",
booktitle = "2019 IEEE International Ultrasonics Symposium, IUS 2019",
}