A C-band Lithium Niobate MEMS Filter with 10% Fractional Bandwidth for 5G Front-ends

Yansong Yang, Ruochen Lu, Liuqing Gao, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a new class of micro-electromechanical system (MEMS) C-band filters for 5G front-ends. The filter is comprised of resonators based on the first-order asymmetric Lamb wave (A1) mode in thin-film lithium niobate. The fabricated filter has been demonstrated at 4.5 GHz with sharp roll-off, flat in-band group delay, and spurious-free response over a wide frequency range. Specifically, the filter shows a 3-dB fractional bandwidth (FBW) of 10%, an insertion loss (IL) of 1.7 dB, an out-of-band (OoB) rejection of -13 dB, and a compact footprint of 0.36 mm2. The demonstrations herein mark the largest fractional bandwidth (FBW) achieved for acousticonly filters at 5G frequencies.

Original languageEnglish (US)
Title of host publication2019 IEEE International Ultrasonics Symposium, IUS 2019
PublisherIEEE Computer Society
Pages1981-1984
Number of pages4
ISBN (Electronic)9781728145969
DOIs
StatePublished - Oct 2019
Event2019 IEEE International Ultrasonics Symposium, IUS 2019 - Glasgow, United Kingdom
Duration: Oct 6 2019Oct 9 2019

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2019-October
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2019 IEEE International Ultrasonics Symposium, IUS 2019
CountryUnited Kingdom
CityGlasgow
Period10/6/1910/9/19

Keywords

  • 5G front-ends
  • Acoustic
  • C-band
  • Filters
  • Lithium niobate
  • MEMS
  • New radio
  • Resonators
  • Spurious modes suppression

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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