A novel photolithography process was utilized to precisely align and pattern environmentally sensitive hydrogels onto silicon microcantilevers, after microcantilevers were fabricated and released. By patterning environmentally sensitive hydrogels onto silicon microcantilevers, an ultra-sensitive pH microsensor was prepared for MEMS and BioMEMS applications. Specifically, a crosslinked poly(methacrylic acid) network containing significant amounts of poly(ethylene glycol) dimethacrylate was studied. This hydrogel exhibits a swelling dependence on pH. Hydrogels were patterned onto the silicon microcantilevers utilizing a mask aligner to allow for precise positioning. Via modification of the silicon surface with γ-methacryloxypropyl trimethoxysilane, covalent adhesion was gained between the polymer and the silicon surface. The micropatterned hydrogels were analyzed using optical microscopy and profilometry. The bending response of patterned cantilevers with a change in environmental pH was observed, providing proof-of-concept for a MEMS/BioMEMS sensor based on microcantilevers patterned with environmentally sensitive hydrogels.

Original languageEnglish (US)
Pages (from-to)1650-1651
Number of pages2
JournalAnnual International Conference of the IEEE Engineering in Medicine and Biology - Proceedings
StatePublished - Dec 1 2002
EventProceedings of the 2002 IEEE Engineering in Medicine and Biology 24th Annual Conference and the 2002 Fall Meeting of the Biomedical Engineering Society (BMES / EMBS) - Houston, TX, United States
Duration: Oct 23 2002Oct 26 2002


  • BioMEMS
  • Hydrogel
  • MEMS
  • Microcantilever
  • Microsensor

ASJC Scopus subject areas

  • Signal Processing
  • Biomedical Engineering
  • Computer Vision and Pattern Recognition
  • Health Informatics

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