A 90nm CMOS integrated Nano-Photonics technology for 25Gbps WDM optical communications applications

Solomon Assefa, Steven Shank, William Green, Marwan Khater, Edward Kiewra, Carol Reinholm, Swetha Kamlapurkar, Alexander Rylyakov, Clint Schow, Folkert Horst, Huapu Pan, Teya Topuria, Philip Rice, Douglas M. Gill, Jessie Rosenberg, Tymon Barwicz, Min Yang, Jonathan Proesel, Jens Hofrichter, Bert OffreinXiaoxiong Gu, Wilfried Haensch, John Ellis-Monaghan, Yurii A Vlasov

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The first sub-100nm technology that allows the monolithic integration of optical modulators and germanium photodetectors as features into a current 90nm base highperformance logic technology node is demonstrated. The resulting 90nm CMOS-integrated Nano-Photonics technology node is optimized for analog functionality to yield power-efficient single-die multichannel wavelength-mulitplexed 25Gbps transceivers.

Original languageEnglish (US)
Title of host publication2012 IEEE International Electron Devices Meeting, IEDM 2012
DOIs
StatePublished - Dec 1 2012
Externally publishedYes
Event2012 IEEE International Electron Devices Meeting, IEDM 2012 - San Francisco, CA, United States
Duration: Dec 10 2012Dec 13 2012

Publication series

NameTechnical Digest - International Electron Devices Meeting, IEDM
ISSN (Print)0163-1918

Other

Other2012 IEEE International Electron Devices Meeting, IEDM 2012
CountryUnited States
CitySan Francisco, CA
Period12/10/1212/13/12

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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  • Cite this

    Assefa, S., Shank, S., Green, W., Khater, M., Kiewra, E., Reinholm, C., Kamlapurkar, S., Rylyakov, A., Schow, C., Horst, F., Pan, H., Topuria, T., Rice, P., Gill, D. M., Rosenberg, J., Barwicz, T., Yang, M., Proesel, J., Hofrichter, J., ... Vlasov, Y. A. (2012). A 90nm CMOS integrated Nano-Photonics technology for 25Gbps WDM optical communications applications. In 2012 IEEE International Electron Devices Meeting, IEDM 2012 [6479162] (Technical Digest - International Electron Devices Meeting, IEDM). https://doi.org/10.1109/IEDM.2012.6479162