A 3.5 GHz hybrid wideband RF filter using AlN S1 lamb mode resonator

Anming Gao, Jie Zou, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

High frequency bands such as LTE band 42 and band 43 require resonators and filters that can operate at frequencies higher than 3 GHz. However, existing lithium niobate fundamental symmetric (S0) lamb mode resonators and surface acoustic wave (SAW) resonators have operating frequency limitations (<2 GHz) due to their low phase velocities. High frequency AlN film bulk acoustic resonators (FBARs) suffer from the deteriorated crystallization and power handling issues due to the thin AlN film. High frequency AlN S0 lamb mode resonators encounter lithography and power handling challenges because of their narrow pitch. The first-order symmetric (S1) lamb mode in AlN shows a very high phase velocity and is promising in building high frequency resonators and filters. This work thoroughly investigates the S1 lamb mode resonator and extends its application to high frequency RF filters with a hybrid topology.

Original languageEnglish (US)
Title of host publication2017 IEEE International Ultrasonics Symposium, IUS 2017
PublisherIEEE Computer Society
ISBN (Electronic)9781538633830
DOIs
StatePublished - Oct 31 2017
Event2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States
Duration: Sep 6 2017Sep 9 2017

Publication series

NameIEEE International Ultrasonics Symposium, IUS
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Other

Other2017 IEEE International Ultrasonics Symposium, IUS 2017
CountryUnited States
CityWashington
Period9/6/179/9/17

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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    Gao, A., Zou, J., & Gong, S. (2017). A 3.5 GHz hybrid wideband RF filter using AlN S1 lamb mode resonator. In 2017 IEEE International Ultrasonics Symposium, IUS 2017 [8092973] (IEEE International Ultrasonics Symposium, IUS). IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2017.8092973