@inproceedings{91f4200e631e4d178a5e9a0309f7c3f2,
title = "A 175 MHz 72 μw Voltage Controlled Oscillator with 1.4% Tuning Range based on Lithium Niobate MEMS Resonator and 65 nm CMOS",
abstract = "This paper presents the first voltage controlled MEMS oscillator (VCMO) based on the heterogeneous integration of a high Q Lithium Niobate (LN) micromechanical resonator and CMOS. A LN resonator array with a series resonance of 171.1 MHz, a Q of 410, and an electromechanically coupling factor of 12.7% is adopted, while TSMC 65 nm RF LP CMOS technology is used to implement the feedback and tuning circuit with an active area of 220× 70 μ m2. The frequency tuning is achieved by programming a binary weighted digital capacitor bank and a varactor that are both connected in series to the resonator. The oscilla-tor's best measured phase noise performance is -72 and -153 dBc/Hz at 1 kHz and 10 MHz offsets from 178.23 and 175.83 MHz carriers respectively. The VCMO consumes a maximum current of 60 μ A from a 1.2 V supply while realizing a tuning range of 2.4 MHz (∼ 1.4% tuning range). Such VCMOs can be applied to enable ultra-low power, low phase noise, and wideband RF signal synthesis for Internet of Things.",
keywords = "RF MEMS, internet of things, lithium niobate, oscillator, phase noise",
author = "Ali Kourani and Ruochen Lu and Tomas Manzaneque and Yansong Yang and Anming Gao and Songbin Gong",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 2018 IEEE/MTT-S International Microwave Symposium, IMS 2018 ; Conference date: 10-06-2018 Through 15-06-2018",
year = "2018",
month = aug,
day = "17",
doi = "10.1109/MWSYM.2018.8439385",
language = "English (US)",
isbn = "9781538650677",
series = "IEEE MTT-S International Microwave Symposium Digest",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "567--570",
booktitle = "Proceedings of the 2018 IEEE/MTT-S International Microwave Symposium, IMS 2018",
address = "United States",
}