A 175 MHz 72 μw Voltage Controlled Oscillator with 1.4% Tuning Range based on Lithium Niobate MEMS Resonator and 65 nm CMOS

Ali Kourani, Ruochen Lu, Tomas Manzaneque, Yansong Yang, Anming Gao, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents the first voltage controlled MEMS oscillator (VCMO) based on the heterogeneous integration of a high Q Lithium Niobate (LN) micromechanical resonator and CMOS. A LN resonator array with a series resonance of 171.1 MHz, a Q of 410, and an electromechanically coupling factor of 12.7% is adopted, while TSMC 65 nm RF LP CMOS technology is used to implement the feedback and tuning circuit with an active area of 220× 70 μ m2. The frequency tuning is achieved by programming a binary weighted digital capacitor bank and a varactor that are both connected in series to the resonator. The oscilla-tor's best measured phase noise performance is -72 and -153 dBc/Hz at 1 kHz and 10 MHz offsets from 178.23 and 175.83 MHz carriers respectively. The VCMO consumes a maximum current of 60 μ A from a 1.2 V supply while realizing a tuning range of 2.4 MHz (∼ 1.4% tuning range). Such VCMOs can be applied to enable ultra-low power, low phase noise, and wideband RF signal synthesis for Internet of Things.

Original languageEnglish (US)
Title of host publicationProceedings of the 2018 IEEE/MTT-S International Microwave Symposium, IMS 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages567-570
Number of pages4
ISBN (Print)9781538650677
DOIs
StatePublished - Aug 17 2018
Event2018 IEEE/MTT-S International Microwave Symposium, IMS 2018 - Philadelphia, United States
Duration: Jun 10 2018Jun 15 2018

Publication series

NameIEEE MTT-S International Microwave Symposium Digest
Volume2018-June
ISSN (Print)0149-645X

Other

Other2018 IEEE/MTT-S International Microwave Symposium, IMS 2018
CountryUnited States
CityPhiladelphia
Period6/10/186/15/18

Fingerprint

voltage controlled oscillators
Variable frequency oscillators
lithium niobates
microelectromechanical systems
MEMS
Resonators
CMOS
Lithium
Tuning
resonators
tuning
Phase noise
Micromechanical resonators
oscillators
feedback circuits
varactor diodes
Varactors
Electric potential
electric potential
programming

Keywords

  • RF MEMS
  • internet of things
  • lithium niobate
  • oscillator
  • phase noise

ASJC Scopus subject areas

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Kourani, A., Lu, R., Manzaneque, T., Yang, Y., Gao, A., & Gong, S. (2018). A 175 MHz 72 μw Voltage Controlled Oscillator with 1.4% Tuning Range based on Lithium Niobate MEMS Resonator and 65 nm CMOS. In Proceedings of the 2018 IEEE/MTT-S International Microwave Symposium, IMS 2018 (pp. 567-570). [8439385] (IEEE MTT-S International Microwave Symposium Digest; Vol. 2018-June). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MWSYM.2018.8439385

A 175 MHz 72 μw Voltage Controlled Oscillator with 1.4% Tuning Range based on Lithium Niobate MEMS Resonator and 65 nm CMOS. / Kourani, Ali; Lu, Ruochen; Manzaneque, Tomas; Yang, Yansong; Gao, Anming; Gong, Songbin.

Proceedings of the 2018 IEEE/MTT-S International Microwave Symposium, IMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 567-570 8439385 (IEEE MTT-S International Microwave Symposium Digest; Vol. 2018-June).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kourani, A, Lu, R, Manzaneque, T, Yang, Y, Gao, A & Gong, S 2018, A 175 MHz 72 μw Voltage Controlled Oscillator with 1.4% Tuning Range based on Lithium Niobate MEMS Resonator and 65 nm CMOS. in Proceedings of the 2018 IEEE/MTT-S International Microwave Symposium, IMS 2018., 8439385, IEEE MTT-S International Microwave Symposium Digest, vol. 2018-June, Institute of Electrical and Electronics Engineers Inc., pp. 567-570, 2018 IEEE/MTT-S International Microwave Symposium, IMS 2018, Philadelphia, United States, 6/10/18. https://doi.org/10.1109/MWSYM.2018.8439385
Kourani A, Lu R, Manzaneque T, Yang Y, Gao A, Gong S. A 175 MHz 72 μw Voltage Controlled Oscillator with 1.4% Tuning Range based on Lithium Niobate MEMS Resonator and 65 nm CMOS. In Proceedings of the 2018 IEEE/MTT-S International Microwave Symposium, IMS 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 567-570. 8439385. (IEEE MTT-S International Microwave Symposium Digest). https://doi.org/10.1109/MWSYM.2018.8439385
Kourani, Ali ; Lu, Ruochen ; Manzaneque, Tomas ; Yang, Yansong ; Gao, Anming ; Gong, Songbin. / A 175 MHz 72 μw Voltage Controlled Oscillator with 1.4% Tuning Range based on Lithium Niobate MEMS Resonator and 65 nm CMOS. Proceedings of the 2018 IEEE/MTT-S International Microwave Symposium, IMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 567-570 (IEEE MTT-S International Microwave Symposium Digest).
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abstract = "This paper presents the first voltage controlled MEMS oscillator (VCMO) based on the heterogeneous integration of a high Q Lithium Niobate (LN) micromechanical resonator and CMOS. A LN resonator array with a series resonance of 171.1 MHz, a Q of 410, and an electromechanically coupling factor of 12.7{\%} is adopted, while TSMC 65 nm RF LP CMOS technology is used to implement the feedback and tuning circuit with an active area of 220× 70 μ m2. The frequency tuning is achieved by programming a binary weighted digital capacitor bank and a varactor that are both connected in series to the resonator. The oscilla-tor's best measured phase noise performance is -72 and -153 dBc/Hz at 1 kHz and 10 MHz offsets from 178.23 and 175.83 MHz carriers respectively. The VCMO consumes a maximum current of 60 μ A from a 1.2 V supply while realizing a tuning range of 2.4 MHz (∼ 1.4{\%} tuning range). Such VCMOs can be applied to enable ultra-low power, low phase noise, and wideband RF signal synthesis for Internet of Things.",
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