A 1.75 GHz piezoelectrically-transduced SiC lateral overmoded bulk acoustic-wave resonator

Songbin Gong, Nai Kuei Kuo, Gianluca Piazza

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents the development and study of a novel lateral overmoded bulk acoustic-wave resonator (LOBAR) using piezoelectric AlN on SiC technology. The SiC LOBAR is a new class of resonant devices in which multiple longitudinal vibrations are excited in a high quality factor (Q) acoustic cavity (SiC) by means of a miniaturized AlN transducer that occupies a small fraction of the device volume (210 m3 of AlN versus 42,021 μm3 of SiC). The first LOBAR prototype reported herein exhibits a Q of 4250 for a series resonance at 1.75 GHz - one of the highest Q demonstrated for micro-resonators using piezoelectric transduction at GHz frequencies. The use of two materials capable of operations at high temperature and in harsh environments [1] simultaneously offers high Q (SiC) and high transduction efficiency (AlN) and enables, for the first time, the development of RF MEMS components for a new realm of applications.

Original languageEnglish (US)
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages922-925
Number of pages4
DOIs
StatePublished - Sep 1 2011
Externally publishedYes
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: Jun 5 2011Jun 9 2011

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period6/5/116/9/11

Keywords

  • AlN
  • LOBAR
  • MEMS resonators
  • SiC
  • piezoelectric

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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    Gong, S., Kuo, N. K., & Piazza, G. (2011). A 1.75 GHz piezoelectrically-transduced SiC lateral overmoded bulk acoustic-wave resonator. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 922-925). [5969701] (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969701