@inproceedings{36b804c42ddf4007890b47567569ed73,
title = "A 1.75 GHz piezoelectrically-transduced SiC lateral overmoded bulk acoustic-wave resonator",
abstract = "This paper presents the development and study of a novel lateral overmoded bulk acoustic-wave resonator (LOBAR) using piezoelectric AlN on SiC technology. The SiC LOBAR is a new class of resonant devices in which multiple longitudinal vibrations are excited in a high quality factor (Q) acoustic cavity (SiC) by means of a miniaturized AlN transducer that occupies a small fraction of the device volume (210 m3 of AlN versus 42,021 μm3 of SiC). The first LOBAR prototype reported herein exhibits a Q of 4250 for a series resonance at 1.75 GHz - one of the highest Q demonstrated for micro-resonators using piezoelectric transduction at GHz frequencies. The use of two materials capable of operations at high temperature and in harsh environments [1] simultaneously offers high Q (SiC) and high transduction efficiency (AlN) and enables, for the first time, the development of RF MEMS components for a new realm of applications.",
keywords = "AlN, LOBAR, MEMS resonators, SiC, piezoelectric",
author = "Songbin Gong and Kuo, {Nai Kuei} and Gianluca Piazza",
year = "2011",
doi = "10.1109/TRANSDUCERS.2011.5969701",
language = "English (US)",
isbn = "9781457701573",
series = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",
pages = "922--925",
booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",
note = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",
}