A 1.65 GHz Lithium Niobate A1 Resonator with Electromechanical Coupling of 14% and Q of 3112

Yansong Yang, Ruochen Lu, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports on the demonstration of a 1.65 GHz A1 mode lithium niobate resonator with a high electromechanical coupling ({k-{t}}^{2}) of 14%, a high-quality factor (Q) of 3112, and a near spurious-free response. The 1.65 GHz resonance has been achieved by exploiting the high phase velocity of the first-order antisymmetric (A1) Lamb wave mode in a Y-cut lithium niobate (LiNbO3) thin film, while spurious mode suppression is accomplished with electrode optimization. The performance demonstrated herein marks the first time that a new resonator technology outperforms surface acoustic wave (SAW) resonators and thin-film bulk acoustic resonators (FBARs) regarding the figure of merit (FoM) in the 1-6 GHz frequency range. Thus, the A1 mode lithium niobate resonator in this work promises a new platform for the fifth-generation (5G) front-end filtering.

Original languageEnglish (US)
Title of host publication2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages875-878
Number of pages4
ISBN (Electronic)9781728116105
DOIs
StatePublished - Jan 2019
Event32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of
Duration: Jan 27 2019Jan 31 2019

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2019-January
ISSN (Print)1084-6999

Conference

Conference32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
CountryKorea, Republic of
CitySeoul
Period1/27/191/31/19

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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    Yang, Y., Lu, R., & Gong, S. (2019). A 1.65 GHz Lithium Niobate A1 Resonator with Electromechanical Coupling of 14% and Q of 3112. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 875-878). [8870796] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2019.8870796