A 1.65 GHz Lithium Niobate A1 Resonator with Electromechanical Coupling of 14% and Q of 3112

Yansong Yang, Ruochen Lu, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports on the demonstration of a 1.65 GHz A1 mode lithium niobate resonator with a high electromechanical coupling ({k-{t}}^{2}) of 14%, a high-quality factor (Q) of 3112, and a near spurious-free response. The 1.65 GHz resonance has been achieved by exploiting the high phase velocity of the first-order antisymmetric (A1) Lamb wave mode in a Y-cut lithium niobate (LiNbO3) thin film, while spurious mode suppression is accomplished with electrode optimization. The performance demonstrated herein marks the first time that a new resonator technology outperforms surface acoustic wave (SAW) resonators and thin-film bulk acoustic resonators (FBARs) regarding the figure of merit (FoM) in the 1-6 GHz frequency range. Thus, the A1 mode lithium niobate resonator in this work promises a new platform for the fifth-generation (5G) front-end filtering.

Original languageEnglish (US)
Title of host publication2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages875-878
Number of pages4
ISBN (Electronic)9781728116105
DOIs
StatePublished - Jan 2019
Event32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of
Duration: Jan 27 2019Jan 31 2019

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2019-January
ISSN (Print)1084-6999

Conference

Conference32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
CountryKorea, Republic of
CitySeoul
Period1/27/191/31/19

Fingerprint

Electromechanical coupling
lithium niobates
Resonators
Lithium
resonators
Surface waves
Acoustic resonators
Thin films
Phase velocity
Lamb waves
acoustics
thin films
Demonstrations
phase velocity
figure of merit
Acoustic waves
Q factors
platforms
Electrodes
frequency ranges

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Yang, Y., Lu, R., & Gong, S. (2019). A 1.65 GHz Lithium Niobate A1 Resonator with Electromechanical Coupling of 14% and Q of 3112. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 875-878). [8870796] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2019.8870796

A 1.65 GHz Lithium Niobate A1 Resonator with Electromechanical Coupling of 14% and Q of 3112. / Yang, Yansong; Lu, Ruochen; Gong, Songbin.

2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. p. 875-878 8870796 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yang, Y, Lu, R & Gong, S 2019, A 1.65 GHz Lithium Niobate A1 Resonator with Electromechanical Coupling of 14% and Q of 3112. in 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019., 8870796, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2019-January, Institute of Electrical and Electronics Engineers Inc., pp. 875-878, 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019, Seoul, Korea, Republic of, 1/27/19. https://doi.org/10.1109/MEMSYS.2019.8870796
Yang Y, Lu R, Gong S. A 1.65 GHz Lithium Niobate A1 Resonator with Electromechanical Coupling of 14% and Q of 3112. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc. 2019. p. 875-878. 8870796. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2019.8870796
Yang, Yansong ; Lu, Ruochen ; Gong, Songbin. / A 1.65 GHz Lithium Niobate A1 Resonator with Electromechanical Coupling of 14% and Q of 3112. 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 875-878 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).
@inproceedings{240254cbb8054414bf210a6ac449e24f,
title = "A 1.65 GHz Lithium Niobate A1 Resonator with Electromechanical Coupling of 14{\%} and Q of 3112",
abstract = "This paper reports on the demonstration of a 1.65 GHz A1 mode lithium niobate resonator with a high electromechanical coupling ({k-{t}}^{2}) of 14{\%}, a high-quality factor (Q) of 3112, and a near spurious-free response. The 1.65 GHz resonance has been achieved by exploiting the high phase velocity of the first-order antisymmetric (A1) Lamb wave mode in a Y-cut lithium niobate (LiNbO3) thin film, while spurious mode suppression is accomplished with electrode optimization. The performance demonstrated herein marks the first time that a new resonator technology outperforms surface acoustic wave (SAW) resonators and thin-film bulk acoustic resonators (FBARs) regarding the figure of merit (FoM) in the 1-6 GHz frequency range. Thus, the A1 mode lithium niobate resonator in this work promises a new platform for the fifth-generation (5G) front-end filtering.",
author = "Yansong Yang and Ruochen Lu and Songbin Gong",
year = "2019",
month = "1",
doi = "10.1109/MEMSYS.2019.8870796",
language = "English (US)",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "875--878",
booktitle = "2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019",
address = "United States",

}

TY - GEN

T1 - A 1.65 GHz Lithium Niobate A1 Resonator with Electromechanical Coupling of 14% and Q of 3112

AU - Yang, Yansong

AU - Lu, Ruochen

AU - Gong, Songbin

PY - 2019/1

Y1 - 2019/1

N2 - This paper reports on the demonstration of a 1.65 GHz A1 mode lithium niobate resonator with a high electromechanical coupling ({k-{t}}^{2}) of 14%, a high-quality factor (Q) of 3112, and a near spurious-free response. The 1.65 GHz resonance has been achieved by exploiting the high phase velocity of the first-order antisymmetric (A1) Lamb wave mode in a Y-cut lithium niobate (LiNbO3) thin film, while spurious mode suppression is accomplished with electrode optimization. The performance demonstrated herein marks the first time that a new resonator technology outperforms surface acoustic wave (SAW) resonators and thin-film bulk acoustic resonators (FBARs) regarding the figure of merit (FoM) in the 1-6 GHz frequency range. Thus, the A1 mode lithium niobate resonator in this work promises a new platform for the fifth-generation (5G) front-end filtering.

AB - This paper reports on the demonstration of a 1.65 GHz A1 mode lithium niobate resonator with a high electromechanical coupling ({k-{t}}^{2}) of 14%, a high-quality factor (Q) of 3112, and a near spurious-free response. The 1.65 GHz resonance has been achieved by exploiting the high phase velocity of the first-order antisymmetric (A1) Lamb wave mode in a Y-cut lithium niobate (LiNbO3) thin film, while spurious mode suppression is accomplished with electrode optimization. The performance demonstrated herein marks the first time that a new resonator technology outperforms surface acoustic wave (SAW) resonators and thin-film bulk acoustic resonators (FBARs) regarding the figure of merit (FoM) in the 1-6 GHz frequency range. Thus, the A1 mode lithium niobate resonator in this work promises a new platform for the fifth-generation (5G) front-end filtering.

UR - http://www.scopus.com/inward/record.url?scp=85070345342&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85070345342&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2019.8870796

DO - 10.1109/MEMSYS.2019.8870796

M3 - Conference contribution

AN - SCOPUS:85070345342

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 875

EP - 878

BT - 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019

PB - Institute of Electrical and Electronics Engineers Inc.

ER -