@inproceedings{ae6ef3be7e1c4b02a349bc45983250a1,
title = "A 15.8 GHz A6 Mode Resonator with Q of 720 in Complementarily Oriented Piezoelectric Lithium Niobate Thin Films",
abstract = "We present a 15.8 GHz sixth-order antisymmetric (A6) mode resonator in thin-film lithium niobate (LiNbO3). The device shows a high quality factor (Q) of 720 and an extracted electromechanical coupling (k2) of 0.62%. The simultaneously high frequency and high Q are enabled by a unique complementarily oriented bi-layer acoustic resonator (COBAR) design. The device employs a 1.2m complementarily oriented piezoelectric (COP) X-cut thin-film LiNbO3. The measured loaded Q at resonance (720) and fQ product (1.14×1013) are among the highest for piezoelectric acoustic resonators beyond 6 GHz. The thickness-extensional (TE) COBAR technology can potentially facilitate various 5G frequency synthesis applications upon optimization.",
keywords = "Thin-film devices, complementarily oriented piezoelectric lithium niobate, piezoelectric devices, quality factor",
author = "Ruochen Lu and Songbin Gong",
note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 2021 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2021 - Proceedings ; Conference date: 07-07-2021 Through 17-07-2021",
year = "2021",
doi = "10.1109/EFTF/IFCS52194.2021.9604327",
language = "English (US)",
series = "2021 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2021 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2021 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2021 - Proceedings",
address = "United States",
}