TY - GEN
T1 - A 14.7 GHz Lithium Niobate Acoustic Filter with Fractional Bandwidth of 2.93%
AU - Gao, Liuqing
AU - Yang, Yansong
AU - Gong, Songbin
N1 - Publisher Copyright:
© 2020 IEEE.
PY - 2020/9/7
Y1 - 2020/9/7
N2 - This work presents the first demonstration of a wideband hybrid monolithic acoustic filter in the Ku-band that overcomes the electromechanical coupling (kt2) limit on the fractional bandwidth (FBW) of conventional ladder topology acoustic filters. This work employs the bandwidth-widening technique of combining a shunt inductor to a resonator to compensate for low kt2. The filter combines electromagnetic and acoustic structures to take the advantages of both: wideband, high Q, and compact sizes. The fabricated filter based on the fifth-order antisymmetric Lamb wave mode (A5) with 1.1% kt2has a 3-dB FBW of 2.93% at 14.7 GHz, stopband insertion loss of 19.5 dB, with a small footprint of 2.25 mm2.
AB - This work presents the first demonstration of a wideband hybrid monolithic acoustic filter in the Ku-band that overcomes the electromechanical coupling (kt2) limit on the fractional bandwidth (FBW) of conventional ladder topology acoustic filters. This work employs the bandwidth-widening technique of combining a shunt inductor to a resonator to compensate for low kt2. The filter combines electromagnetic and acoustic structures to take the advantages of both: wideband, high Q, and compact sizes. The fabricated filter based on the fifth-order antisymmetric Lamb wave mode (A5) with 1.1% kt2has a 3-dB FBW of 2.93% at 14.7 GHz, stopband insertion loss of 19.5 dB, with a small footprint of 2.25 mm2.
KW - Ku-band
KW - Microelectromechanical systems
KW - Millimeter-wave devices
KW - Piezoelectric devices
UR - http://www.scopus.com/inward/record.url?scp=85097872769&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85097872769&partnerID=8YFLogxK
U2 - 10.1109/IUS46767.2020.9251795
DO - 10.1109/IUS46767.2020.9251795
M3 - Conference contribution
AN - SCOPUS:85097872769
T3 - IEEE International Ultrasonics Symposium, IUS
BT - IUS 2020 - International Ultrasonics Symposium, Proceedings
PB - IEEE Computer Society
T2 - 2020 IEEE International Ultrasonics Symposium, IUS 2020
Y2 - 7 September 2020 through 11 September 2020
ER -