A 14.7 GHz Lithium Niobate Acoustic Filter with Fractional Bandwidth of 2.93%

Liuqing Gao, Yansong Yang, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work presents the first demonstration of a wideband hybrid monolithic acoustic filter in the Ku-band that overcomes the electromechanical coupling (kt2) limit on the fractional bandwidth (FBW) of conventional ladder topology acoustic filters. This work employs the bandwidth-widening technique of combining a shunt inductor to a resonator to compensate for low kt2. The filter combines electromagnetic and acoustic structures to take the advantages of both: wideband, high Q, and compact sizes. The fabricated filter based on the fifth-order antisymmetric Lamb wave mode (A5) with 1.1% kt2has a 3-dB FBW of 2.93% at 14.7 GHz, stopband insertion loss of 19.5 dB, with a small footprint of 2.25 mm2.

Original languageEnglish (US)
Title of host publicationIUS 2020 - International Ultrasonics Symposium, Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781728154480
DOIs
StatePublished - Sep 7 2020
Event2020 IEEE International Ultrasonics Symposium, IUS 2020 - Las Vegas, United States
Duration: Sep 7 2020Sep 11 2020

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2020-September
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2020 IEEE International Ultrasonics Symposium, IUS 2020
CountryUnited States
CityLas Vegas
Period9/7/209/11/20

Keywords

  • Ku-band
  • Microelectromechanical systems
  • Millimeter-wave devices
  • Piezoelectric devices

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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