TY - GEN
T1 - A 14.7 GHz Lithium Niobate Acoustic Filter with Fractional Bandwidth of 2.93%
AU - Gao, Liuqing
AU - Yang, Yansong
AU - Gong, Songbin
N1 - Funding Information:
This work was supported by the N.S.F. SpecEES program.
Funding Information:
ACKNOWLEDGMENT The authors wish to thank the N.S.F. SpecEES program for funding support. The authors also want to thank the staff of the Nick Holonyak Micro and Nanotechnology Laboratory and the Micro-Nano Mechanical System Cleanroom at the University of Illinois at Urbana-Champaign where the devices were fabricated.
PY - 2020/9/7
Y1 - 2020/9/7
N2 - This work presents the first demonstration of a wideband hybrid monolithic acoustic filter in the Ku-band that overcomes the electromechanical coupling (kt2) limit on the fractional bandwidth (FBW) of conventional ladder topology acoustic filters. This work employs the bandwidth-widening technique of combining a shunt inductor to a resonator to compensate for low kt2. The filter combines electromagnetic and acoustic structures to take the advantages of both: wideband, high Q, and compact sizes. The fabricated filter based on the fifth-order antisymmetric Lamb wave mode (A5) with 1.1% kt2has a 3-dB FBW of 2.93% at 14.7 GHz, stopband insertion loss of 19.5 dB, with a small footprint of 2.25 mm2.
AB - This work presents the first demonstration of a wideband hybrid monolithic acoustic filter in the Ku-band that overcomes the electromechanical coupling (kt2) limit on the fractional bandwidth (FBW) of conventional ladder topology acoustic filters. This work employs the bandwidth-widening technique of combining a shunt inductor to a resonator to compensate for low kt2. The filter combines electromagnetic and acoustic structures to take the advantages of both: wideband, high Q, and compact sizes. The fabricated filter based on the fifth-order antisymmetric Lamb wave mode (A5) with 1.1% kt2has a 3-dB FBW of 2.93% at 14.7 GHz, stopband insertion loss of 19.5 dB, with a small footprint of 2.25 mm2.
KW - Ku-band
KW - Microelectromechanical systems
KW - Millimeter-wave devices
KW - Piezoelectric devices
UR - http://www.scopus.com/inward/record.url?scp=85097872769&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85097872769&partnerID=8YFLogxK
U2 - 10.1109/IUS46767.2020.9251795
DO - 10.1109/IUS46767.2020.9251795
M3 - Conference contribution
AN - SCOPUS:85097872769
T3 - IEEE International Ultrasonics Symposium, IUS
BT - IUS 2020 - International Ultrasonics Symposium, Proceedings
PB - IEEE Computer Society
T2 - 2020 IEEE International Ultrasonics Symposium, IUS 2020
Y2 - 7 September 2020 through 11 September 2020
ER -