A 1.17 GHz wideband MEMS filter using higher order SH0 lithium niobate resonators

Yong Ha Song, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports on the design, analysis, and demonstration of a lithium niobate (LiNbO3) wideband radio frequency (RF) microelectromechanical systems (MEMS) filter with a low insertion loss of 2.1 dB, a wide bandwidth of 4.9 %, and a spurious-free passband response at 1.17 GHz. Such high performance is achieved by arraying resonators designed with pronounced 3rd order shear horizontal (SH0) mode resonances. The 3rd order SH0 mode was selected to attain a 3× higher resonant frequency, and subsequently enable a filter center frequency beyond 1 GHz without resorting to costly fine-resolution lithography. To suppress the unwanted modes while maintaining a large electromechanical coupling (kt2), and a large fractional bandwidth, the ratio of the electrode pitch (Wp) to the total width of the resonator (W) has been optimized using finite element analyses.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages806-809
Number of pages4
ISBN (Electronic)9781538627310
DOIs
StatePublished - Jul 26 2017
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: Jun 18 2017Jun 22 2017

Publication series

NameTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
CountryTaiwan, Province of China
CityKaohsiung
Period6/18/176/22/17

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Instrumentation
  • Electrical and Electronic Engineering

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  • Cite this

    Song, Y. H., & Gong, S. (2017). A 1.17 GHz wideband MEMS filter using higher order SH0 lithium niobate resonators. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 806-809). [7994171] (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994171