TY - GEN
T1 - A 1.17 GHz wideband MEMS filter using higher order SH0 lithium niobate resonators
AU - Song, Yong Ha
AU - Gong, Songbin
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/7/26
Y1 - 2017/7/26
N2 - This paper reports on the design, analysis, and demonstration of a lithium niobate (LiNbO3) wideband radio frequency (RF) microelectromechanical systems (MEMS) filter with a low insertion loss of 2.1 dB, a wide bandwidth of 4.9 %, and a spurious-free passband response at 1.17 GHz. Such high performance is achieved by arraying resonators designed with pronounced 3rd order shear horizontal (SH0) mode resonances. The 3rd order SH0 mode was selected to attain a 3× higher resonant frequency, and subsequently enable a filter center frequency beyond 1 GHz without resorting to costly fine-resolution lithography. To suppress the unwanted modes while maintaining a large electromechanical coupling (kt2), and a large fractional bandwidth, the ratio of the electrode pitch (Wp) to the total width of the resonator (W) has been optimized using finite element analyses.
AB - This paper reports on the design, analysis, and demonstration of a lithium niobate (LiNbO3) wideband radio frequency (RF) microelectromechanical systems (MEMS) filter with a low insertion loss of 2.1 dB, a wide bandwidth of 4.9 %, and a spurious-free passband response at 1.17 GHz. Such high performance is achieved by arraying resonators designed with pronounced 3rd order shear horizontal (SH0) mode resonances. The 3rd order SH0 mode was selected to attain a 3× higher resonant frequency, and subsequently enable a filter center frequency beyond 1 GHz without resorting to costly fine-resolution lithography. To suppress the unwanted modes while maintaining a large electromechanical coupling (kt2), and a large fractional bandwidth, the ratio of the electrode pitch (Wp) to the total width of the resonator (W) has been optimized using finite element analyses.
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U2 - 10.1109/TRANSDUCERS.2017.7994171
DO - 10.1109/TRANSDUCERS.2017.7994171
M3 - Conference contribution
AN - SCOPUS:85029357938
T3 - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 806
EP - 809
BT - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Y2 - 18 June 2017 through 22 June 2017
ER -