8.5 GHz and 11.5 GHz Acoustic Delay Lines Using Higher-Order Lamb Modes in Lithium Niobate Thin Film

Ruochen Lu, Yansong Yang, Michael Breen, Ming Huang Li, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present the first group of X-band acoustic delay lines (ADLs) in lithium niobate (LiNbO3) thin films. The fabricated miniature ADLs exploit the high phase velocities (vp) and large electromechanical couplings (k2) of the 2nd-order symmetric (S2) mode and the 3rd-order antisymmetric (A3) mode in Z-cut LiNbO3. The S2 passband centered at 8.55 GHz shows a minimum insertion loss (IL) of 13.3 dB, a 3-dB fractional bandwidth (FBW) of 1.20% and group delays between 11.5 ns and 93.6 ns, while the A3 passband centered at 11.5 GHz shows a minimum IL of 11.6 dB, an FBW of 1.14% and group delays between 9.0 ns and 65.1 ns. The vp, group velocity (vg), and propagation loss (PL) have been experimentally extracted. The demonstrated X-band ADL platform could potentially enable high-frequency passive signal processing functions for 5G applications.

Original languageEnglish (US)
Title of host publication33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1242-1245
Number of pages4
ISBN (Electronic)9781728135809
DOIs
StatePublished - Jan 2020
Event33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 - Vancouver, Canada
Duration: Jan 18 2020Jan 22 2020

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2020-January
ISSN (Print)1084-6999

Conference

Conference33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
CountryCanada
CityVancouver
Period1/18/201/22/20

Keywords

  • 5G
  • acoustic delay line
  • Lamb mode
  • lithium niobate
  • microelectromechanical system
  • piezoelectricity
  • X-band

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Lu, R., Yang, Y., Breen, M., Li, M. H., & Gong, S. (2020). 8.5 GHz and 11.5 GHz Acoustic Delay Lines Using Higher-Order Lamb Modes in Lithium Niobate Thin Film. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 (pp. 1242-1245). [9056190] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS46641.2020.9056190