5 GHz lithium niobate MEMS resonators with high FoM of 153

Yansong Yang, Anming Gao, Ruochen Lu, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports on the demonstration of a new class of super-high frequency (SHF) microelectromechanical system (MEMS) resonators operating in the 5 GHz range. SHF resonances have been achieved using the first order antisymmetric (A1) mode, which features a phase velocity exceeding 10000 m/s in ion-sliced and suspended Z-cut Lithium Nio-bate (LiNbO3) thin films. The fabricated device has demonstrated a high electromechanical coupling (kt2) of 29% and a high quality factor (Q) of 527 simultaneously. Consequently, this work marks the first time that MEMS resonators at SHF were demonstrated with an extremely high figure of merit (FoM= kt2Q) of 153. The SHF operation and high FoM of these A1 mode devices have showcased their potential as the key building blocks for future SHF front-end filters and multiplexers.

Original languageEnglish (US)
Title of host publication2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages942-945
Number of pages4
ISBN (Electronic)9781509050789
DOIs
StatePublished - Feb 23 2017
Event30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States
Duration: Jan 22 2017Jan 26 2017

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
CountryUnited States
CityLas Vegas
Period1/22/171/26/17

Fingerprint

lithium niobates
microelectromechanical systems
MEMS
Resonators
Lithium
resonators
Electromechanical coupling
Phase velocity
Demonstrations
Ions
Thin films
multiplexing
phase velocity
figure of merit
Q factors
lithium
lithium niobate
filters
thin films
ions

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Yang, Y., Gao, A., Lu, R., & Gong, S. (2017). 5 GHz lithium niobate MEMS resonators with high FoM of 153. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 942-945). [7863565] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863565

5 GHz lithium niobate MEMS resonators with high FoM of 153. / Yang, Yansong; Gao, Anming; Lu, Ruochen; Gong, Songbin.

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 942-945 7863565 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yang, Y, Gao, A, Lu, R & Gong, S 2017, 5 GHz lithium niobate MEMS resonators with high FoM of 153. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863565, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 942-945, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 1/22/17. https://doi.org/10.1109/MEMSYS.2017.7863565
Yang Y, Gao A, Lu R, Gong S. 5 GHz lithium niobate MEMS resonators with high FoM of 153. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 942-945. 7863565. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2017.7863565
Yang, Yansong ; Gao, Anming ; Lu, Ruochen ; Gong, Songbin. / 5 GHz lithium niobate MEMS resonators with high FoM of 153. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 942-945 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).
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