TY - GEN
T1 - 5 GHz A1 Mode Lateral Overtone Bulk Acoustic Resonators in Thin-Film Lithium Niobate
AU - Lu, Ruochen
AU - Yang, Yansong
AU - Gong, Songbin
N1 - Publisher Copyright:
© 2020 IEEE.
PY - 2020/9/7
Y1 - 2020/9/7
N2 - This work presents the first demonstration of the first-order antisymmetric (A1) mode lateral overtone bulk acoustic resonators (LOBAR) in thin-film lithium niobate (mathrm{LiNbO}{3}). Thanks to the fast phase velocity, large coupling, and low loss of A1 in mathrm{LiNbO}{3}, equally spaced tones around 5 GHz are achieved using a large feature size of 500 nm. Electromechanical coupling (k-{2}) around 0.4 % and high Q over 1000 are observed in more than 20 tones, surpassing the reported overtone resonators at 5 GHz. Meanwhile, the highest Q of 2725, and the highest fQ product of 1.4cdot 10-{13} are measured at 5.16 GHz. Upon further optimizations, A1 LOBARs can facilitate novel 5G signal processing functions.
AB - This work presents the first demonstration of the first-order antisymmetric (A1) mode lateral overtone bulk acoustic resonators (LOBAR) in thin-film lithium niobate (mathrm{LiNbO}{3}). Thanks to the fast phase velocity, large coupling, and low loss of A1 in mathrm{LiNbO}{3}, equally spaced tones around 5 GHz are achieved using a large feature size of 500 nm. Electromechanical coupling (k-{2}) around 0.4 % and high Q over 1000 are observed in more than 20 tones, surpassing the reported overtone resonators at 5 GHz. Meanwhile, the highest Q of 2725, and the highest fQ product of 1.4cdot 10-{13} are measured at 5.16 GHz. Upon further optimizations, A1 LOBARs can facilitate novel 5G signal processing functions.
KW - First-order antisymmetric mode
KW - Lateral overtone bulk acoustic resonator
KW - Lithium niobate
KW - Microelectromechanical systems
KW - Piezoelectric resonator
UR - http://www.scopus.com/inward/record.url?scp=85097874952&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85097874952&partnerID=8YFLogxK
U2 - 10.1109/IUS46767.2020.9251334
DO - 10.1109/IUS46767.2020.9251334
M3 - Conference contribution
AN - SCOPUS:85097874952
T3 - IEEE International Ultrasonics Symposium, IUS
BT - IUS 2020 - International Ultrasonics Symposium, Proceedings
PB - IEEE Computer Society
T2 - 2020 IEEE International Ultrasonics Symposium, IUS 2020
Y2 - 7 September 2020 through 11 September 2020
ER -