5 GHz A1 Mode Lateral Overtone Bulk Acoustic Resonators in Thin-Film Lithium Niobate

Ruochen Lu, Yansong Yang, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work presents the first demonstration of the first-order antisymmetric (A1) mode lateral overtone bulk acoustic resonators (LOBAR) in thin-film lithium niobate (mathrm{LiNbO}{3}). Thanks to the fast phase velocity, large coupling, and low loss of A1 in mathrm{LiNbO}{3}, equally spaced tones around 5 GHz are achieved using a large feature size of 500 nm. Electromechanical coupling (k-{2}) around 0.4 % and high Q over 1000 are observed in more than 20 tones, surpassing the reported overtone resonators at 5 GHz. Meanwhile, the highest Q of 2725, and the highest fQ product of 1.4cdot 10-{13} are measured at 5.16 GHz. Upon further optimizations, A1 LOBARs can facilitate novel 5G signal processing functions.

Original languageEnglish (US)
Title of host publicationIUS 2020 - International Ultrasonics Symposium, Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781728154480
DOIs
StatePublished - Sep 7 2020
Event2020 IEEE International Ultrasonics Symposium, IUS 2020 - Las Vegas, United States
Duration: Sep 7 2020Sep 11 2020

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2020-September
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2020 IEEE International Ultrasonics Symposium, IUS 2020
CountryUnited States
CityLas Vegas
Period9/7/209/11/20

Keywords

  • First-order antisymmetric mode
  • Lateral overtone bulk acoustic resonator
  • Lithium niobate
  • Microelectromechanical systems
  • Piezoelectric resonator

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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