Abstract
This paper presents a new class of micro-electro-mechanical system (MEMS) C-band filters for 5G front-ends. The filter is comprised of resonators based on the first-order asymmetric Lamb wave (A1) mode in thin-film lithium niobate. Two filters have been demonstrated at 4.5 GHz with sharp roll-off, flat in-band group delay, and spurious-free response over a wide frequency range. The first design shows a 3-dB fractional bandwidth (FBW) of 10%, an insertion loss (IL) of 1.7 dB, an out-of-band (OoB) rejection of-13 dB, and a compact footprint of 0.36 mm2, while the second design shows a 3-dB FBW of 8.5%, an IL of 2.7 dB, an OoB rejection of-25 dB, and a footprint of 0.9 mm2. The demonstrations herein mark the largest FBW achieved for acoustic-only filters at 5G frequencies.
Original language | English (US) |
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Article number | 8745668 |
Pages (from-to) | 575-577 |
Number of pages | 3 |
Journal | Journal of Microelectromechanical Systems |
Volume | 28 |
Issue number | 4 |
DOIs | |
State | Published - Aug 2019 |
Keywords
- 5G front-ends
- C-band
- MEMS
- acoustic
- constant in-band group delays
- filters
- lithium niobate
- new radio
- resonators
- spurious modes suppression
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering