4.5 GHz Lithium Niobate MEMS Filters with 10% Fractional Bandwidth for 5G Front-Ends

Yansong Yang, Ruochen Lu, Liuqing Gao, Songbin Gong

Research output: Contribution to journalArticlepeer-review


This paper presents a new class of micro-electro-mechanical system (MEMS) C-band filters for 5G front-ends. The filter is comprised of resonators based on the first-order asymmetric Lamb wave (A1) mode in thin-film lithium niobate. Two filters have been demonstrated at 4.5 GHz with sharp roll-off, flat in-band group delay, and spurious-free response over a wide frequency range. The first design shows a 3-dB fractional bandwidth (FBW) of 10%, an insertion loss (IL) of 1.7 dB, an out-of-band (OoB) rejection of-13 dB, and a compact footprint of 0.36 mm2, while the second design shows a 3-dB FBW of 8.5%, an IL of 2.7 dB, an OoB rejection of-25 dB, and a footprint of 0.9 mm2. The demonstrations herein mark the largest FBW achieved for acoustic-only filters at 5G frequencies.

Original languageEnglish (US)
Article number8745668
Pages (from-to)575-577
Number of pages3
JournalJournal of Microelectromechanical Systems
Issue number4
StatePublished - Aug 2019


  • 5G front-ends
  • C-band
  • MEMS
  • acoustic
  • constant in-band group delays
  • filters
  • lithium niobate
  • new radio
  • resonators
  • spurious modes suppression

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering


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