40 000 pixel arrays of ac-excited silicon microcavity plasma devices

Arrays of (50 μm) ² Si microcavity plasma devices, as large as 40 000 pixels (200 × 200) with a packing density of 10 ⁴ pixels cm ^-2, have been operated continuously in 500-900 Torr of Ne with ac excitation (5-20 kHz). More than two orders of magnitude larger than previously reported microplasma device arrays, 200 × 200 pixel structures produce uniform glow discharges in each pixel, have a power consumption of ∼0.85 W cm ^-2 for p _Ne=700 Torr and an excitation frequency of 5 kHz, and exhibit maximum radiative efficiency for a Ne pressure of p _Ne= 700 Torr and an excitation frequency of 10-15 kHz. All arrays examined (10×10→200×200) are characterized by pixel-to-pixel emission intensities constant over the entire array to within ±10%, and no barriers to the successful operation of much larger arrays are apparent.