@inproceedings{3b14eee2aa1e4dfebf00b2d9e1a2121d,
title = "3D SU-8 structures assembled via micro-Lego",
abstract = "Deterministic multi-layer micro-scale assembly of SU-8 polymer objects as well as the cohesively joined SU-8 interface strength have been investigated. The process of SU-8 photoresist (PR) into retrievable individual micro-scale objects format called 'ink' is reviewed and the construction of three-dimensional (3D) unique micro-structures via micro-Lego, which refers to the transfer printing of the ink onto a target site in conjunction with permanent joining has been demonstrated. Owing to the additive 3D manufacturing nature of the micro-Lego, the demonstrative micro-scale architectures are unattainable through other means of micro-manufacturing including photolithography. The mechanical integrity of the SU-8 and SU-8 interface formed by micro-Lego is inspected by probing SU-8 cantilever specimens using a nanoindenter and the results are examined by finite element analysis (FEA). The analysis reveals that the joining strength is ∼ 0.988 J/m2, which is similar with wafer scale silicon (Si) bonding strength.",
keywords = "Micro-Lego, Microassembly, SU-8, Transfer printing",
author = "Hohyun Keum and Seok Kim",
year = "2017",
month = aug,
day = "3",
doi = "10.1109/MARSS.2017.8001922",
language = "English (US)",
series = "International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
editor = "Sinan Haliyo and Sylvain Martel and Sergej Fatikow",
booktitle = "International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 - Proceedings",
address = "United States",
note = "1st International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 ; Conference date: 17-07-2017 Through 21-07-2017",
}