3D SU-8 structures assembled via micro-Lego

Hohyun Keum, Seok Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Deterministic multi-layer micro-scale assembly of SU-8 polymer objects as well as the cohesively joined SU-8 interface strength have been investigated. The process of SU-8 photoresist (PR) into retrievable individual micro-scale objects format called 'ink' is reviewed and the construction of three-dimensional (3D) unique micro-structures via micro-Lego, which refers to the transfer printing of the ink onto a target site in conjunction with permanent joining has been demonstrated. Owing to the additive 3D manufacturing nature of the micro-Lego, the demonstrative micro-scale architectures are unattainable through other means of micro-manufacturing including photolithography. The mechanical integrity of the SU-8 and SU-8 interface formed by micro-Lego is inspected by probing SU-8 cantilever specimens using a nanoindenter and the results are examined by finite element analysis (FEA). The analysis reveals that the joining strength is ∼ 0.988 J/m2, which is similar with wafer scale silicon (Si) bonding strength.

Original languageEnglish (US)
Title of host publicationInternational Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 - Proceedings
EditorsSinan Haliyo, Sylvain Martel, Sergej Fatikow
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538603468
DOIs
StatePublished - Aug 3 2017
Event1st International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 - Montreal, Canada
Duration: Jul 17 2017Jul 21 2017

Publication series

NameInternational Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 - Proceedings

Other

Other1st International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017
CountryCanada
CityMontreal
Period7/17/177/21/17

Fingerprint

Ink
Joining
Photolithography
Photoresists
Manufacturing
Printing
Photoresist
Cantilever
Finite element method
Silicon
Wafer
Integrity
Microstructure
Multilayer
Polymers
Finite Element
Three-dimensional
Target
Object

Keywords

  • Micro-Lego
  • Microassembly
  • SU-8
  • Transfer printing

ASJC Scopus subject areas

  • Mechanical Engineering
  • Artificial Intelligence
  • Control and Optimization

Cite this

Keum, H., & Kim, S. (2017). 3D SU-8 structures assembled via micro-Lego. In S. Haliyo, S. Martel, & S. Fatikow (Eds.), International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 - Proceedings [8001922] (International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MARSS.2017.8001922

3D SU-8 structures assembled via micro-Lego. / Keum, Hohyun; Kim, Seok.

International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 - Proceedings. ed. / Sinan Haliyo; Sylvain Martel; Sergej Fatikow. Institute of Electrical and Electronics Engineers Inc., 2017. 8001922 (International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 - Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Keum, H & Kim, S 2017, 3D SU-8 structures assembled via micro-Lego. in S Haliyo, S Martel & S Fatikow (eds), International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 - Proceedings., 8001922, International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 - Proceedings, Institute of Electrical and Electronics Engineers Inc., 1st International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017, Montreal, Canada, 7/17/17. https://doi.org/10.1109/MARSS.2017.8001922
Keum H, Kim S. 3D SU-8 structures assembled via micro-Lego. In Haliyo S, Martel S, Fatikow S, editors, International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2017. 8001922. (International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 - Proceedings). https://doi.org/10.1109/MARSS.2017.8001922
Keum, Hohyun ; Kim, Seok. / 3D SU-8 structures assembled via micro-Lego. International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 - Proceedings. editor / Sinan Haliyo ; Sylvain Martel ; Sergej Fatikow. Institute of Electrical and Electronics Engineers Inc., 2017. (International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 - Proceedings).
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