3D nanoscale pattern formation in porous silicon

Ik Su Chun, Edmond K. Chow, Xiuling Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A simple and effective processing technique for 3D nanoscale pattern formation in light emitting porous silicon is reported. The technique is based on metal assisted chemical etching and defined by the 2D nanoscale metal pattern.

Original languageEnglish (US)
Title of host publicationConference on Lasers and Electro-Optics, CLEO 2008
PublisherOptical Society of America
ISBN (Print)9781557528599
StatePublished - Jan 1 2008
EventConference on Lasers and Electro-Optics, CLEO 2008 - San Jose, CA, United States
Duration: May 4 2008May 9 2008

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherConference on Lasers and Electro-Optics, CLEO 2008
CountryUnited States
CitySan Jose, CA
Period5/4/085/9/08

Fingerprint

Porous silicon
porous silicon
Metals
metals
Etching
etching
Processing

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Cite this

Chun, I. S., Chow, E. K., & Li, X. (2008). 3D nanoscale pattern formation in porous silicon. In Conference on Lasers and Electro-Optics, CLEO 2008 (Optics InfoBase Conference Papers). Optical Society of America.

3D nanoscale pattern formation in porous silicon. / Chun, Ik Su; Chow, Edmond K.; Li, Xiuling.

Conference on Lasers and Electro-Optics, CLEO 2008. Optical Society of America, 2008. (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chun, IS, Chow, EK & Li, X 2008, 3D nanoscale pattern formation in porous silicon. in Conference on Lasers and Electro-Optics, CLEO 2008. Optics InfoBase Conference Papers, Optical Society of America, Conference on Lasers and Electro-Optics, CLEO 2008, San Jose, CA, United States, 5/4/08.
Chun IS, Chow EK, Li X. 3D nanoscale pattern formation in porous silicon. In Conference on Lasers and Electro-Optics, CLEO 2008. Optical Society of America. 2008. (Optics InfoBase Conference Papers).
Chun, Ik Su ; Chow, Edmond K. ; Li, Xiuling. / 3D nanoscale pattern formation in porous silicon. Conference on Lasers and Electro-Optics, CLEO 2008. Optical Society of America, 2008. (Optics InfoBase Conference Papers).
@inproceedings{08a514ee0e9b4de0aa958b458549c0c9,
title = "3D nanoscale pattern formation in porous silicon",
abstract = "A simple and effective processing technique for 3D nanoscale pattern formation in light emitting porous silicon is reported. The technique is based on metal assisted chemical etching and defined by the 2D nanoscale metal pattern.",
author = "Chun, {Ik Su} and Chow, {Edmond K.} and Xiuling Li",
year = "2008",
month = "1",
day = "1",
language = "English (US)",
isbn = "9781557528599",
series = "Optics InfoBase Conference Papers",
publisher = "Optical Society of America",
booktitle = "Conference on Lasers and Electro-Optics, CLEO 2008",

}

TY - GEN

T1 - 3D nanoscale pattern formation in porous silicon

AU - Chun, Ik Su

AU - Chow, Edmond K.

AU - Li, Xiuling

PY - 2008/1/1

Y1 - 2008/1/1

N2 - A simple and effective processing technique for 3D nanoscale pattern formation in light emitting porous silicon is reported. The technique is based on metal assisted chemical etching and defined by the 2D nanoscale metal pattern.

AB - A simple and effective processing technique for 3D nanoscale pattern formation in light emitting porous silicon is reported. The technique is based on metal assisted chemical etching and defined by the 2D nanoscale metal pattern.

UR - http://www.scopus.com/inward/record.url?scp=84898651763&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84898651763&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84898651763

SN - 9781557528599

T3 - Optics InfoBase Conference Papers

BT - Conference on Lasers and Electro-Optics, CLEO 2008

PB - Optical Society of America

ER -