@inproceedings{5119299851f34c6184555e7ab754b99f,
title = "3D Nanoscale pattern formation in porous silicon",
abstract = "A simple and effective processing technique for 3D nanoscale pattern formation in light emitting porous silicon is reported. The technique is based on metal assisted chemical etching and defined by the 2D nanoscale metal pattern.",
author = "Chun, {Ik Su} and Chow, {Edmond K.} and Xiuling Li",
year = "2008",
month = sep,
day = "15",
doi = "10.1109/CLEO.2008.4551902",
language = "English (US)",
isbn = "1557528594",
series = "2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS",
booktitle = "2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS",
note = "Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS 2008 ; Conference date: 04-05-2008 Through 09-05-2008",
}